| < SPUTTER VARIAN > | ||
| Description | Part Number | Qty |
| BEARING ASSEMBLY | 00-687587-00 | 2 |
| BELLOWS SEAL (QUAD-RING) | 00-600055-01 | 71 |
| SCREW | 04-708867-01 | 16 |
| CABLE AY,HALL SENSOR | 04-709290-02 | 3 |
| CAP SENSOR | 00-674682-00 | 10 |
| ISOLATION VALVE SENSOR ASS'Y | 04-705505- | 2 |
| FLOW METER BOARD | 04-671880-00 | 1 |
| PWA AUDIO BOARD | 04-705450-02 | 4 |
| PWA INTERFACE BOARD | 04-705740-01 | 3 |
| PWA INTERLOCK BOARD | 04-705657-01 | 4 |
| PWA,ENCODER CON | 04-708881-01 | 1 |
| PWA,PCM,INTERFA | 04-708658-01 | 2 |
| POWER SUPPLY MNC,ASSY | 04-705549-01 | 3 |
| WIRE | 00-680992-00 | 1 |
| STEPPING MOTOR | 00-687777-00 | 2 |
| FLOW SWITCH | 00-684433-08 | 2 |
| SWITCH PANEL | 00-666019-00 | 2 |
| COIL ASSY RF 5" | 04-709472-01 | 1 |
| COIL LOAD 4"(3K-MATCH BOX) | 00-671686-00 | 2 |
| HEATER VALVE ASS'Y | 00-674766-00 | 12 |
| PWA SENSOR BOARD | 4 | |
| SENSOR BOARD | 16 | |
| BASE PLATE | 1 | |
| BUSHING PINS | 04-715751-01 | 6 |
| COIL ASSY, RF PLASMA | 04-716601-01 | 1 |
| ANALOG INTERFACE PWA | 04-705297-01 | 5 |
| CLAMP | 04-706867-08 | 4 |
| FLAT ALIGNER ROLLER | 00-664366-00 | 16 |
| FRONT PANEL PWA | 04-705154-01 | 4 |
| CONTROLLER EHROTHEREM | 00-672160-00 | 1 |
| COVER WATER TUBE | 00-681092-00 | 1 |
| LOAD ARM SET | 04-708367-00 | 1 |
| PWA | 04-671879-00 | 1 |
| PWA | 04-708891-01 | 1 |
| RF CAN ASS'Y | 00-683421-01 | 1 |
| SHIELD ASS'Y P/P RAM | 00-680907-00 | 4 |
| SHIELD CHAM MIDDLE | 04-706291-01 | 12 |
| SHIELD ELEVATOR | 04-705632-01 | 1 |
| SHIELD EXTERIOR SOURCE | 00-680902-00 | 6 |
| SHIELD HIGH VAC | 04-709427-01 | 2 |
| SHIELD RF ETCH | 00-680701-00 | 1 |
| SHIELD SOURCE ISOLATION UP | 00-680934-00 | 2 |
| SHIELD STIFFENER / 3290 | 00-683133-00 | 14 |
| SHIELD SUPPORT | 04-708059-02 | 1 |
| SHIELD | 00-680534-00 | 1 |
| STANOFF,TRASFER MOTO | 00-664085-00 | 18 |
| TOOL | 04-707499-01 | 3 |
| TUBE TC GAUGE | 00-674474-00 | 2 |
| WHEEL TENSIONER | 04-708169-01 | 4 |
| RETAINER, SPRING | 3 | |
| WASHER PLATE | 5 | |
| BEARING, SLEEVE | 21-180050-00 | 30 |
| NYLON BEARING | 21-139969-00 | 1 |
| NYLON BEARING | 12 | |
| T/C GAUGE CABLE | 0881-K1649-301 | 3 |
| CASTER 2" DIA | 21-247831-00 | 27 |
| COPPER GASKET 2 3/4 CONFLA | 09-535014 | 9 |
| FILTER/DIFFUSER, SST | 04-715945-01 | 2 |
| MASS FLOW SENSOR | 27-110507-00 | 2 |
| FTG. 3/4-16" HOSE BA | 04-716893-03 | 5 |
| CLAMP 6" W/WING | 04-718672-02(04-716089- | 3 |
| CLAMP RING | 04-715031-02 | 8 |
| GAUGE PRESSURE, SPAN | 27-239989-00 | 2 |
| BELLOWS CHUCK | 1 | |
| PIN SHEAR | 2 | |
| SHIELD CHAMB HI-VAC END | 1 | |
| SHIELD HTR UPPER | 2 | |
| SHIELD OUTER RING LOWER 4" | 4 | |
| SHIELD OUTER SUPPORT | 3 | |
| SHIELD TABLE | 3 | |
| SHIELD | 04-709806-01 | 1 |
| SLEEVE | 04-714523-01 | 2 |
| STAND OFF | 12 | |
| TOOL | 04-710616-01 | 2 |
| BEARING 4-13 -ST | 33-79528445 | 16 |
| BOLT HEX SUS304 MS*6*16 | 33-3800125 | 20 |
| BRAKER ASSY | 1 | |
| COVER ARM | 04-714993-02 | 5 |
| ADHESIVE THREADLOCKER 10 | 5 | |
| DTE MODEM | 04-714478-01 | 2 |
| CONN, Q.D. 1/4 MPT | 28-890233-00 | 5 |
| CONN, Q.D. 1/4 MPT | 28-890288-00 | 5 |
| LOCATOR | 04-709582-01 | 6 |
| SCREW CAP HEX SOCK HD S/S | 207 | |
| PWA.PIZEO INTERFACE | 04-715989-02 | 1 |
| SPOOL FILLER | 04-715749-01 | 5 |
| NESLAB FILTER | 27-590939-00 | 1 |
| WASHER SPLIT LOCK #10 | 14-202010-00 | 21 |
| WASHER SPR LOCK #4 | 14-212004-00 | 14 |
| SCREW SCH 25-20*62 | 12-600301-00 | 6 |
| WASHER FLAT #8 | 48 | |
| WASHER,FLAT #8 NYL | 14-999705-00 | 8 |
| SOLENOID VALVE | 27-179850-00 | 8 |
| LOCK WASHER | 9 | |
| LOCKNUT 5/16-32,4SLTS | 6 | |
| O-RING VITON | 27-402322-00 | 10 |
| O-RING VITON | 27-402518-00 | 8 |
| O-RING | 2740302100 | 20 |
| O-RING VITON | 27-402620-00 | 15 |
| AIR CYLINDER | 27-999751-00 | 2 |
| SCREW, SET | 10 | |
| SCREW, SHLDR | 10 | |
| BALL BEARING | 696HZZAG2 | 4 |
| SPRING B FOR SHUTTER STOPPER | 854-0259B | 8 |
| SHIELD LIFT PIN | BB10-155507 | 12 |
| MODULE SS RELAY D.C | 72-999021-00 | 15 |
| RELAY DPDT 120VAC COIL | 72-125992-00 | 10 |
| PCB,PFC CONTROLL MODULE(POLYC | 600206-01 | 1 |
| PWA,DUAL CHAN V | 47-700090-01 | 1 |
| HEATER FLANGE STOP | BB10155932 | 2 |
| FILTER ET-1502013F-A167-2 | BB95-056-491 | 6 |
| FILTER | BB95-056501 | 2 |
| O-RING VITON | 10 | |
| CIRCUIT, 1A/AP(3K) | 55-700388-00 | 2 |
| CIRCUIT, 20A/2P(3K) | 55-700391-00 | 2 |
| CIRCUIT, 2A/2P(3K) | 55-700398-00 | 2 |
| CIRCUIT, 5A/3P(3K) | 55-700654-00 | 2 |
| L-FITTING WITH SCREW | 854-2386 | 8 |
| LAMP QUARTZ 120V | BB93355852 | 9 |
| FICTURE LIFT DCM COMPNENT | 3 | |
| STOPPER | A16-00402 | 16 |
| TEFLON STOPPER 3 | A16-07682 | 2 |
| WASHER SPLIT LOCK #10 PK25 | 9910000242 | 25 |
| 3280 DRAWING V1 | 87-400792-00 | 1 |
| 3280 DRAWING V2 | 87-400799-00 | 1 |
| BOARD | 78-910930-00 | 1 |
| BOLT FOR BACKING PLATE REM | 844-0866 | 2 |
| BOLT FOR SHIELD SUPPORT | 844-0882 | 84 |
| CABLE NO.5/6 (7M) | 846-1179 | 2 |
| D/C CONVERTER +-15V | 78-501026-00 | 1 |
| FLOPPY DISK DRIVE | 78-500920-00 | 1 |
| INSULATOR PY1.2*2.5 | 845-0504 | 2 |
| PY3 STOPPER SHAFT | 854-0260 | 8 |
| SHIELD | 89-100114-00 | 7 |
| DIAL INDICATOR | BB95-358276 | 4 |
| STOPPER STAY | 854-0772 | 8 |
| TAPE DRIVER | 78-910691-00 | 2 |
| REFLETOR HTR ASSY | BB10-156091 | 22 |
| BALL BEARING | NSK696ZZAG2 | 2 |
| BEARING WITH FLANGE | SSRF-620 | 12 |
| BEARING | PIE6-PIE19-6T | 84 |
| WING CLAMP(NARROW) | VM0471867001 | 5 |
| GASKET KIT | MDC #350004 | 25 |
| ISOLATOR | KF5T-4151-018C2 | 20 |
| TUBING,PFA,1/8 ID | 28-149988-00 | 1 |
| UP/DOWN RING ASSY A8S | BB10-303484 | 4 |
| FILAMENT ASS'Y(HOT) | 04-717629-01 | 5 |
| VALVE ASS'Y | 04-706878-02 | 4 |
| CABLE PUMP 5P | 04-709311-02 | 1 |
| FEED THROUGH VIPS | 04-717624-01 | 1 |
| BASE 6" | BB10-301793 | 1 |
| UPS | BB87-057693 | 1 |
| TOOL MICRO | 04-719949-01 | 4 |
| SCREW | 00-653460-00 | 2 |
| NUT | 13-112066-00 | 8 |
| CK-ADVIC-KA ECO STATUS | 99-06087-02 | 2 |
| M/C PUMP | S60A 3DIA 460W 2.0HP | 23 |
| PORT PLUG SCR,10-32 | 28-898898-00 | 100 |
| GAS SPRING | 00-683772-01 | 2 |