| < SPUTTER ULVAC > | ||
| Description | Part Number | Qty |
| VITON RING L FOR BELT(AL) | 835-0796L | 7 |
| O-RING BELT K PY3(CC) | 835-0797K | 4 |
| CYLINDER (HEATER ARM) | CDQ2A40-100D-A80/S | 22 |
| SCREW(TIN COATING) | MCH4502-044-16 | 21 |
| CYLINDER | MCH4500-078-23(CNR-20 | 4 |
| CYLINDER(1) | MCH4502-021-06 | 1 |
| CYLINDER | MCH4502-021-07 | 1 |
| CYLINDER(MAIN/V H) | MCH4503-025-07 | 1 |
| O-RING | P-25 | 10 |
| SHIELD PLATE | MCH4500-080-02 | 2 |
| CAP | MCH4502-048-11 | 12 |
| COLLER(1) | MCH4504-037-08 | 20 |
| CYILNDER MECHANISM | MCH4500-054-01 | 1 |
| CYILNDER | MCH4500-019-41 | 6 |
| DEPOSITION SHIELD PLATE FIXIN | MCH4502-0 | 4 |
| SHIELD CAP | MCH4504-029-33 | 4 |
| O-RING VITON (G-100) | 22 | |
| BACKING COVER | EM0867-147-04A | 6 |
| O-RING VITON | MCH4500-019-11 | 28 |
| O-RING VITON | MCH4500-045-05 | 24 |