| < DIFFUSION GS > | ||
| Description | Part Number | Qty |
| LIFT PIN (C/P) | UM4E00147300 | 4 |
| PUSHER PIN (BOTTOM) | UM4E00147200 | 3 |
| PUSHER PIN (TOP) | UM4E00147100 | 3 |
| UV SENSOR SET | UV254F | 1 |
| HEATER PLATE (AL) | UG3E-2263 | 1 |
| PRESSURE INDICATOR METER | PSD-02A | 1 |
| A1203 CERAMICS BALL | DIA 4MM | 17 |
| CHAMBER SHUTTER SPRING | AUS 12-50 | 4 |
| NOZZLE GLASS PACKING | UM4E00148500 | 4 |
| NOZZLE PACKING | UM4E00148600 | 10 |
| VACUUM REGULATOR | U04A97108100-195 | 2 |
| WAFER GUIDE PIN | 4A7-735-314 | 3 |