| DIFFUSION LRC | ||
| Description | Part Number | Qty |
| LIGHT PIPE | 666-61210-001 | 3 |
| O-RING VITON | 800-210 | 4 |
| INSULATOR 4 PIN LIFTER | 716-51222-001 | 5 |
| ASSY PCB-ADIO | 810-057023-001 | 1 |
| PCB,CCD ARRAY INTERFACE | 810-057006-001 | 1 |
| ASSY,PCB,INTERLOCK,FLOW | 810-057067-001 | 1 |
| ASSY,PCB,INTERLOCK,PURGE | 810-057068-001 | 1 |
| PCB,S/IO,MODIFICATION | 718-057046-001 | 1 |
| PCB,SRAM,MODIFICATION | 810-057059-001 | 1 |
| PCB,DC/DC CONVERT P/S | 810-057024-001 | 1 |
| PCB,INTERLOCK,GAS/HEATER | 810-057066-001 | 1 |
| QTZ HEATER SUPPORT | 716-51195-003 | 8 |
| MTR STEPPER SPINNER | 853-057101-001 | 1 |
| DC SERVO MOTOR(OUTER ARM) | 853-057108-016 | 1 |
| DC SERVO MOTOR,WAFER | 853-057107-010 | 1 |
| RELAY,35V,3,PDT,KUP | 644-60865-001 | 2 |
| FUSE SOLID STATE 125AMP | 670-060596-001 | 6 |
| POWER SUPPLY,SPM-3 | 660-061449-001 | 1 |
| POWER SUPPLY,SPM-5 | 660-060191-001 | 1 |
| GSKT GATE VALVE INTEGRITY | 849-050259-001 | 2 |
| O-RING VITON | 734-060586-001 | 4 |
| O-RING VITON | 734-000228-001 | 10 |
| O-RING VITON | 734-000230-001 | 9 |
| O-RING | 734-007334-001 | 10 |
| O-RING VITON | 734-008546-001 | 10 |
| O-RING VITON | 734-090048-001 | 2 |
| TRANSMISSION OPTICAL/TC | 684-060526-001 | 3 |
| POTENTIOMETER ARM | 853-057102-002 | 1 |
| BUTTOM QTZ SUPPORT | 716-51137-001 | 1 |
| GSKT CONFLA2 3/4" ELE NKL | 742-060786-002 | 15 |
| QTZ LINER | 716-51923-001 | 3 |
| T/G COUPLER | 716-051303-001 | 2 |
| VCR GASKET NI 3/4" | 796-60392-006 | 25 |
| ASSY GALIL(A) | 853-057116-011 | 1 |
| ASSY GALIL(C) | 853-057116-013 | 1 |
| LIGHT BULB CCD ARRAY | 661-60247-001 | 1 |
| BELLOWS | 839-052615-001 | 2 |
| CALIBRATION DUMMY WAFER 8" | 714-052452-00 | 2 |
| CLMAP FEEDTHRU-BOTTOM | 715-51911-001 | 6 |
| COVER ARM HOUSING INNER | 715-052324-001 | 1 |
| GASKET CONFLAT 1 1/3 ELEC NKL | 742-060786-001 | 3 |
| GASKET CONFLAT NI 8" | 742-060786-006 | 11 |
| REACTOR SIDE WALL HEAT | 714-051965-001 | 12 |
| SNCR FLOW 4.0-20 GPM 1/2" | 771-60388-001 | 2 |
| REGULATOR WITH GAUGE | SL5810-SX-3PW-FV4-F | 5 |
| INNER HEATER | 716-51917-001 | 1 |
| O-RING VITON | 796-060599-001 | 1 |
| CRST BREAKER PUSH PULL | 670-060870-002 | 1 |
| CRST BREAKER PUSH PULL | 670-060870-005 | 1 |
| CRST BREAKER PUSH PULL | 670-060870-001 | 1 |
| CRST BREAKER PUSH PULL | 670-060870-006 | 1 |
| CRST BREAKER PUSH PULL | 670-060870-004 | 1 |
| CRST BREAKER PUSH PULL | 670-060870-003 | 1 |