| < DIFFUSION ASML > | ||
| Description | Part Number | Qty |
| ASSY POWER MODULE SCR-LP | 02-005350D02 | 1 |
| MOTOR-GEAR SPUR 31:1 GR W/ENC | 30-106660A73 | 4 |
| MOTOR GEAR SUPUR 6.3:1 GR W/EN | 30-106660A72 | 4 |
| MOTOR PLNTY GR 1410.4:1 | 30-106660A71 | 4 |
| MOTOR Z AXIS ASS'Y | 93068-70003 | 4 |
| 10RM 100 BOARD | 93068-70017(AP-004) | 1 |
| 1ORM 200 BOARD | 93068-70015(AP-0005) | 4 |
| C TO C ENCODER (D 축) | 93068-70005 | 2 |
| VIDEO BOARD | GA3-0020-003 | 2 |
| 10RM 200 BOARD | 93068-70016(AP-0005) | 4 |
| CONTROL BOARD C TO C (Y) | AP-0001-2 | 2 |
| CONTROL BOARD C TO C (Z1) | AP-0001-3 | 2 |
| CONTROL BOARD C TO C (Z2) | AP-0001-4 | 2 |
| CONTROL BOARD C TO C | 93068-70011 | 1 |
| DRIVER BOARD (Y) | AP-0002-2 | 2 |
| FIRING BOARD | RA8-8900508 | 2 |
| MOTOR X AXIS ASSY C TO C | MP0001 93068-70 | 3 |
| ASM VMP-100 EPROM | WAJ7443 EPROM | 1 |
| MOTOR Z AXIS ASSY C TO C | MP0003 93068-70 | 1 |