| < DIFFUSION AMAT > | ||
| Description | Part Number | Qty |
| SECONDARY COOLING SCRUBBER | 857-2CJ | 2 |
| CONDICTIY LIQUID LEVEL SENSER | 800-CLL | 3 |
| AIR FLOW SENSOR SWITCH | 855-301 | 1 |
| N2 FLOW SENSOR/SWITCH | 855-300M | 1 |
| DRIFICE FILTER | 800-200A | 1 |
| CYLINDER ASSEMBLY | 800-103AC | 2 |
| CLEANING MECHANISM COIL | 800-42S | 2 |
| N/C SONIC LIQUID LEVEL SENSOR | SLLSMY2 | 1 |