| <Axcelis 장비용> | ||
| Part Number | Description | Machine |
| 11022760 / 110046400 | Bushing, Lead / Bushing, Bismuth GSD II HV | Paradigm XE / GSD II |
| 17174960 / 170093560 | Bushing, Lead / Bushing, Bismuth (Old P/N is 17100510) | GSD I |
| 17083980 / 170093550 | Bushing, Lead / Bushing, Bismuth | |
| 170080410 | Insulator, Turbo Pump | |
| 12S1289 | Bushing | GSD ULTRA |
| 190001240 | Source Bushing | |
| 17322400 | Bushing | |
| 170001720 | HV Bushing | |
| 170094560 | Plens Insulator | |
| 1795140 | Source, Bushing 8200 | |
| 1754620 | Bushing | |
| 3110-0069-005 | Insulator Plens 300MM | |
| 3110-0070-003 | Insulator 300MM | |
| 17266090 | Bushing (SEN) | |
| 12S3517 | Bushing | |
| <Varian 장비용> | ||
| Part Number | Description | Machine |
| E17205540 | Seismic Foot | VIISTA |
| E17295090 | Decel Column Right | VIISTA |
| E17295100 | Decel Column Left | VIISTA |
| E19285970 | HV Bushing Source HC | VIISTA HC,XE,XER 900XP |
| E19285970M | HV Bushing Source HC (Modified) | VIISTA HC,XE,XER 900XP |
| E17181190 | Insulator Decel ES Lens | VIISTA HCP,HP |
| E17299950 | 55KV Vacuum Feedthru | VIISTA |
| E17326910 | Isolator D2 ES Lens | VIISTA HC |
| E17330980 | Bushing Insulator Decel | VIISTA |
| E19010120 | HV Source Bushing | Vision |
| 101595001 | Bushing | E1000 |
| E17298790 | Feedthru 3-cond, hv | VIISTA |
| E17125590 | Source Bushing (Lead Free) | E Series |
| E17201073 | 200mm Molded Site | Kestrel |
| E17201790 | Feedthru Insulator | VIISTA |
| B05871 | Rectifier Assembly | Kestrel |
| H5022003 | Bushing HV (Lead Free) | E1000 |
| E11308380 | Insulator Shielded Assembly | VIISTA |
| E17124850 | Bushing | Vista HC |
| E17152180 | Insulator Beamline | VIISTA |
| E11308390 | Resistor Focus Assembly | VIISTA |
| E19283190 | Source Bushing, 70 KV, No-Track | Vista V810EHP |
| E17066660 | 80 KV Insulator | Vision |
| E17123040 | Source Bushing E220/E500 | E-Series |
| E17288530 | Feedthru, 2-cond, HV | VIISTA |
| E17134430 | Feedthru, 2-cond, HV | VIISTA |
| E17149770 | Feedthru, 3-cond, HV | VIISTA |
| E17135150 | Isolator Top | Vision |
| E17138240 | Insulator Mount Plate | VIISTA |
| E17135160 | Isolator Bottom | Vision |
| E17335880 | Insulator Stack, HV Terminal | VIISTA |
| 4154600 | Source Bushing | Kestrel |
| E17259640 | Silicone Boot | VIISTA |
| E17075721 | Bushing 200KX Accel Tube | VIISTA |
| E17288250 | Feedthru | VIISTA |
| E17103460 | Feedthru | Vision |
| E17304660 | Feedthru | VIISTA |
| E17251820 | Adapter Insulator | VIISTA |
| 4210500 | 150 MM Pad | Kestrel |
| E17304661 | Feedthru | VIISTA |
| E17136730 | Standoff Insulator | Vision |
| E17296930 | Feedthru | VIISTA |
| 4210501 | 200MM Pad | Kestrel |
| E17006400 | Bushing | * |
| E17007051 | Accel Insulator (Racetrack) | E-Series |
| 7032001 | Source Bushing | * |
| E17470060 | Accel Bushing | Stealth |
| E17470070 | Accel Bushing | Stealth |
| E17470080 | Accel Bushing | Stealth |
| E19292240 | HV Source Bushing HC | |
| E19288430 | Bushing HV | |
| E11395391 | Resistor Board Assembly (Piston Board) | Stealth |
| H5022001 | Source Bushing HV E220/E500 | E220/E500 |
| 115731001 | Lead Bushing | * |
| E17084641 | Bushing | * |
| E17029860 | Bushing | * |
| 1715920 | Bushing | * |
| 109887001 | Source Bushing | * |
| E17269400 | Feedthru, 2-cond, HV | VIISTA |
| <Nissin 장비용> | ||
| Part Number | Description | Machine |
| DE-310640 | Insulation Ring (Bushing) | Exceed 3000AH |
| <Applied Materials 장비용> | ||
| Part Number | Description | Machine |
| 0041-11326 | XR80 Source Bushing, Quantum, Enlarged Dia | |
| 0040-51795 / 0041-11326 | XR80 Source Bushing, Quantum | |
| 0040-45472 / 0041-11324 | Source Bushing No Track | |
| 0040-45295 / 0041-11327 | 9500XR Source Bushing No Track 60 KeV | |
| 0040-45296 /0041-11325 | 9500XR Source Bushing No Track 67 KeV | |