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| <
CVD ULVAC-1010 > |
|
| |
| Description |
Part Number |
Qty |
| SOCKET (JOHNSTECH) |
50PIN TSOP |
2 |
| 6"
SUSCEPTOR |
6" |
1 |
| MEMORY KIT |
3G2A5-MP831 |
2 |
| SUSCEPTOR |
5" |
2 |
| 5"
COVERING |
5" |
2 |
| 5"
LIFTER |
5" |
1 |
| 5"
PICK UP |
5 INCH |
1 |
| GLASS FOR
HEATER |
SED 1003-013-06 |
1 |
| 5,6"
PULLY |
SED 1003-061-06 |
1 |
| COVER RING |
SED 1005-21-01 |
1 |
| SUSCEPTOR |
SED 1005-20-04 |
2 |
| WAFER
LIFTER |
SED 1005-020-05 |
2 |
| O-RING |
V-70 |
10 |
| A/O
UNIT(4CH) DC BOARD |
|
1 |
| D/O UNIT
DC BOARD |
|
1 |
| D/I UNIT
DC BOARD |
|
1 |
| A/I
UNIT(4CH) DC BOARD |
|
1 |
| A/O
UNIT(8CH) DC BOARD |
|
1 |
| A/I
UNIT(8CH) DC BOARD |
|
1 |
| CYLINDER |
|
2 |
| VACUUM
METER |
GFE-IG |
1 |
| VACUUM
METER |
GFE-PG |
1 |
| COVER RING
BELLOWS |
|
6 |
| WAFER LIFT
BELLOWS |
|
1 |
| WILSON
SEAL |
|
11 |
|
|
|
