| < CVD GENUS > | ||
| Description | Part Number | Qty |
| RAYTEK CONTROLLER | 0005-00 | 4 |
| GATE VALVE FLANGE | 0013-02 | 2 |
| SPRING | 1105-00 | 20 |
| NUT HEX SS 4-40 | 1070-01 | 10 |
| SCREW SOC CAP VENTED | 10056-06 | 110 |
| TIMING BELT | 2337-01 | 4 |
| SPRING | 1346-11 | 3 |
| WAFER PRESENT SENSOR (CX-D800) | 15051-20 | 6 |
| I/O BOARD | 1569-03 | 2 |
| POWER SUPPLY SWITCHING (15.0A) | 10022-15 | 2 |
| SWITCH PUSH BUTTON 4P2T | 10116-00 | 2 |
| ARM UPRIGHT,LIFT | 10158-00 | 3 |
| THROTTLE VALVE CONTROLLER | 152H-PO | 1 |
| SCREW | 20697-05 | 50 |
| POWER SUPPLY | 1457-00 | 2 |
| O-RING VITON | 10221-14 | 13 |
| O-RING VITON | 10221-18 | 10 |
| PROBE TEMPERATURE SENSOR | 2142-01 | 1 |
| SENSOR | 2377-00 | 2 |
| ADAPTOR HALF TO FULL RACK (RM6) | 10124-00 | 2 |
| D/S P.C.B | 2289-00 | 1 |
| BOLT | 0716-01 | 12 |
| CAP | 10328-00 | 1 |
| FORK, WAFER | 10508-00 | 1 |
| INSULATOR RTD BACKSIDE ARGON | 11669-00 | 3 |
| PIN EXTRECTOR | 10936-00 | 1 |
| RETAINING RING | 1106-00 | 20 |
| WINDOW VIEW PORT | 10098-00 | 1 |
| PRINTED CIRCUIT ASSY | 2269-03 | 7 |
| FUSE HOLDER&LED 110VDC,220V | 20196-04 | 1 |
| LOAD ARM FIXTURE | 10804-04 | 1 |
| SWITCHING MODULE | 2343-00 | 5 |
| SWITCHING MODULE | 2344-00 | 1 |
| VACUUM SWITCH | 2669-00 | 1 |
| OPTO ROTATING CAM AS | 0526-00 | 2 |
| NOZZLE | 22008-00 | 6 |
| GENUS GATE VALVE | 3080-00 | 2 |
| CIRCUIT BREAKER | 1247-47 | 1 |
| PLATE DIFFUSER DIAMETER | 21617-00 | 7 |
| GASKET | 1418-00 | 30 |
| SCRWE 10-32*3.0L | 1094-13 | 40 |
| LOAD DOOR PROCESS CHAMBER | 14047-00 | 1 |
| PCA ANLG CHAMBER OUTPUT | 13056-15 | 1 |
| PCA,MOD DIG/ANA | 1549-03 | 3 |
| SCREW,PLATE LOCAL CMBR | 1339-09 | 11 |
| SCREW | 1348-19 | 3 |
| PIN | 4957-00 | 4 |
| OIL PRESSURE SWITCH | 2940-02 | 2 |
| PCA ANA OPTOISO CHAM INPUT | 3569-51 | 1 |
| PCA CARD | 3569-63 | 2 |
| PCA, ANA OPTOISO | 3569-73 | 3 |
| PORT CHAMBER VACUUM | 3016-00 | 8 |
| PORT CHAMBER | 3160-00 | 42 |
| PORT LID VACUUM | 3014-00 | 8 |
| PORT LID | 3162-00 | 10 |
| PRESSURE SWITH AIR/WATER 1/4"MNPT 5PSIG | 22592-02 | 2 |
| RELAY 10A 24VAC | 4212-00 | 3 |
| RELAY | 4152-01 | 12 |
| RELAY | 4152-02 | 12 |
| RELAY | 4152-05 | 1 |
| RELAY | 4152-06 | 2 |
| RELAY | 4152-08 | 2 |
| SCR | 3693-01 | 14 |
| SCREW | 3390-04 | 5 |
| SCREW | 3693-02 | 12 |
| FLOW SWITCH | 4275-00 | 1 |
| SOLENOID VALVE "W" D.B.G.A | 3779-01 | 1 |
| SOLENOID VALVE "W" D.B.G.B | 3779-02 | 1 |
| BEARING MINIATURE | 8722-02 | 8 |
| BEARING | 7847-00 | 2 |
| BEARING | 7853-05 | 2 |
| BEARING | 7867-02 | 2 |
| BEARING | 7867-03 | 1 |
| BEARING | 8058-00 | 2 |
| BEARING | 8722-01 | 2 |
| PIN | 7846-15 | 2 |
| SPRING EXTENSION | 8049-01 | 1 |
| CLAMP | 7944-00 | 1 |
| COUPLING HELICAL | 8033-03 | 1 |
| SCREW | 6225-06 | 2 |
| RELAY | 7764-00 | 1 |
| PLATE,DIFFUSER | 7547-00 | 5 |
| CIRCUIT BREAKER | 4790-08 | 1 |
| LINKAGE LOWER | 4958-00 | 2 |
| CYLINDER CONNECTOR(WITH NEGIREN) | CGA 320 | 11 |
| MOTOR, M092-FD09E | 9388-00 | 2 |
| CYLINDER CONNECTOR(WITH NEGIREN) | CGA 660 | 19 |
| FAB ACTUATOR, SWITCH | 8196-00 | 13 |
| FAB BASE, LIMIT SWITCH | 7634-00 | 1 |
| O-RING VITON | 8101-13 | 4 |
| O-RING VITON | 8102-79 | 5 |
| O-RING VITON | 8102-50 | 1 |
| O-RING VITON | 7869-05 | 1 |
| O-RING VITON | 8100-05 | 2 |
| O-RING VITON | 8100-06 | 17 |
| O-RING | 8101-09 | 1 |
| O-RING VITON | 8102-20 | 2 |
| CIRCUIT BRAKER 10A | 6773-06 | 1 |
| CIRCUIT BRAKER 15A | 6773-07 | 1 |
| O-RING VITON | 8102-44 | 8 |
| CIRCUIT BRAKER 20A | 6773-08 | 1 |
| O-RING VITON | 8102-59 | 1 |
| O-RING VITON | 8102-61 | 1 |
| O-RING | 8102-63 | 1 |
| O-RING VITON | 8102-65 | 2 |
| O-RING VITON | 8102-76 | 1 |
| O-RING | 8103-56 | 1 |
| O-RING VITON | 8103-75 | 1 |
| O-RING VITON | 8103-77 | 4 |
| NIPPLE HALF VACUUM PIPING | 7003-06 | 1 |
| HOSE BELLOWS | 8378-02 | 8 |
| ARM,DRIVE | 9360-00 | 1 |
| LIFT, VACUTRAN | 9030-00 | 1 |
| PCA MOD MULTIBUS 1811 | 9011-02 | 1 |
| SPOOL, ML-B-6597 | 9038-00 | 1 |
| CONFIGURATION D/I | 7709-02 | 1 |
| CONTACTOR | 7705-03 | 1 |
| CONTRACTOR | 7706-05 | 1 |
| HOLD FORK | 8802-00 | 1 |
| KNOB | 7661-00 | 1 |
| MAGNET SAM-COB | 8379-00 | 1 |
| NUT ADAPTOR .375 | 7561-00 | 7 |
| PORT | 7831-00 | 1 |
| PORT | 7833-00 | 1 |
| RETRO REFLECTOR | 7660-00 | 3 |
| SCREW SOC CAP VENTED | 7450-05 | 14 |
| SCREW | 8024-07 | 1 |
| WINDOW | 7649-00 | 1 |
| WINDOW | 8357-00 | 1 |
| HOSE CONNECTOR TUBE | SS-4-HC-A-401 | 50 |
| 100W HBO BLUB | 90071001A | 10 |
| CERAMIC FINGER | 20007300A | 2 |
| COHERENT YAG LASER HEAD FOR 100MW | 90330503A | 2 |
| IMPELLER | C10S-137PDB | 1 |
| FORK, WAFER 6" | 11573-00 | 2 |
| BEARING | 7853-04 | 3 |
| BEARING | 8420-00 | 1 |
| CIRCUIT BREAKER | 1248-35 | 1 |
| CIRCUIT BREAKER | 1248-11 | 1 |
| CONTACTOR, OPEN, 3POLE | 4147-01 | 1 |
| CONTACTOR, OPEN, 3POLE | 4147-05 | 1 |
| VALVE PNEMATIC ANGLE | 24935-02 | 1 |
| GATE VALVE | 10840-PE44 | 1 |
| INSERT | J3-2SS | 6 |
| CPU BOARD | 1529-00 | 3 |
| PCB 3569-01 | 4 | |
| MULTIBUS ANALOG OUT BOARD | 1549-01 | 2 |
| ANALOG IN BOARD | 1559-01 | 2 |
| MULTIBUS ANALOG IN BOARD | 1559-02 | 2 |
| I/O BOARD | 1569-01 | 2 |
| I/O BOARD | 1569-02 | 2 |
| I/O BOARD | 1569-03 | 2 |
| I/O BOARD | 1569-04 | 2 |
| RTD BOARD 2269-01 | 3 | |
| RTD BOARD 2269-02 | 1 | |
| DIGI,OPTO-ISO BOARD LED 2299-02 | 1 | |
| DIGI,OPTO-ISO BOARD PKR 2299-03 | 1 | |
| STEP MOTOR CTRL B/D 2648-01 | 1 | |
| STEP MOTOR CTRL B/D 2648-02 | 2 | |
| SPEP MOTOR CTRL B/D 2648-03 | 2 | |
| CMOS BOARD | 1539-00 | 1 |
| PCA MOD MOTOR CON 9011-05 | 1 | |
| PCA MOD MULTIBUS 9011-03 | 1 | |
| PCA MOD MULTIBUS 9011-04 | 1 | |
| BRACKET, MOUNTAING | 15100-00 | 4 |
| BELLOWS WAFER VALVE | 7631-00 | 2 |
| BASE PLATE PREMIX CHAMBER | 49737-00 | 2 |
| CONTROLLER, POWER | 2370-00 | 1 |
| CABLE END BLUE | 1420-00 | 12 |
| CONTROL ASSY CARD, VACU-TUAN | 9531-00 | 1 |
| DIODE, RECTINER | 1177-01 | 2 |
| FIRTER ELEMELT,ZEOLITE | 10449-00 | 1 |
| SENSOR | B71CC-A2-A/EP376 | 3 |
| FLOW METER LIQUID | 3281-00 | 4 |
| RF GENERATOR | 11699-00 | 1 |
| FAB PIN,INSULATOR | 10006-03 | 1 |
| IC 54K | 14871-00 | 1 |
| LOAD FORK ASSY 4954-03 | 1 | |
| STEPPER MOTOR ASM | 2322-00 | 1 |
| MOTOR DC STEP (PH296-01B) | 9388-00 | 1 |
| FAB MOTOR CHUCK DRIVE MOD | 8840-00 | 1 |
| COUPLING STPR MOTOR | 1442-00 | 2 |
| STEPPER MOTOR A83135 CONFG | 20345-02 | 1 |
| STEPPER MOTOR A8393 CONFG | 20345-01 | 1 |
| STEPPER MOTOR | 20346-00 | 1 |
| ROTAR METER, AIR | 1655-01 | 1 |
| NOZZLE, PREMIX | 15326-00 | 1 |
| O-RING,VITON | 8102-52 | 2 |
| O-RING,VITON. 139X6324 ID | 8102-36 | 2 |
| O-RING,VITON. 103X6711 ID 8102-09 | 2 | |
| PRINTED CIRCUIT ASSY NO FI | 2130-00 | 1 |
| CAM SUPPORT | 0206-15 | 2 |
| POWER SUPPLY 5V 10A | 2 | |
| PRINTED CIRCUIT ASSY SOL 3779-07 | 1 | |
| PRINTED CIRCUIT ASSY 4314-02 | 1 | |
| KEY 187.62L | 1450-01 | 1 |
| PCB ANALOG OPTO GAS | 13056-11 | 1 |
| PCB ANALOG OPTO GAS | 13056-30 | 1 |
| RECEVER FIB OPT | 1423-01 | 3 |
| RELAY SPDT OA | 7764-00 | 1 |
| RELAY OVERLOAD 3 4152-08 | 1 | |
| RELAY SOLLD STATE,24VDC | 1151-07 | 7 |
| RELAY TIMING O-10 MINUTE | 21267-00 | 1 |
| ROTAINER RING | 11667-00 | 2 |
| HI-TEMP RTD | 9041-00 | 1 |
| SEAL RADIL U-TUBE | 1410-02 | 2 |
| SEAL PERROFLUE | 7684-00 | 1 |
| SUPPORT,SAPHIRE LENS | 9608-00 | 2 |
| SENSOR RTD(TERMINAL TYPE) | 1128-01 | 1 |
| SENSOR ASSY 8005-03 | 1 | |
| PHOTO SENSOR 8974-01 | 5 | |
| PHOTO SENSOR 8974-02 | 4 | |
| SWITCHING MODULE OPTO DISC | 2344-00 | 1 |
| SLEEVE,SW | 11741-01 | 2 |
| SWITCH,VACUUM FALL GATE | 20260-00 | 1 |
| SHAFT KEY | 1452-02 | 2 |
| SHAFT PIN ROLL | 1451-08 | 1 |
| SHAFT GEAR BOX | 1444-00 | 2 |
| TRANSMITTER FIB O | 1422-01 | 4 |
| GENUS VALVE GATE | 3080-00 | 2 |
| PCA WF6 CONTROLLER VALVE | 8432-00 | 1 |
| COIL SPRING | 4663-00 | 2 |
| LID ASSY (DCS) | 24712-00 | 2 |