| < CVD ASML > | ||
| Description | Part Number | Qty |
| CKT BRKR 3P 480V 45A | 26-103438 A68 | 1 |
| PCB ASS'Y LED PROCESS | 03-116547D | 2 |
| VALVE ELECTRONIC | 02-103897B01 | 5 |
| ASS'Y-PARTICLE TRAD | 02-111276C01 | 2 |
| KIT-RETRO-AE LDM REM CTL | 04-116598A01 | 1 |
| ASSY POWER SUPPLY BTMC | 200073-01 | 1 |
| CONNECTOR 1.936 LG | 16-117264B01 | 10 |
| BELLOWS PUMP TO BLOWER | 16-112143D01 | 2 |
| BOLCK TOP CONTACT MOUNT | 16-117271C01 | 1 |
| CONTACT BLOCK CONTACT MOUN | 16-117273B01 | 62 |
| GEAR MOTOR 115V,60HZ | 30-106660A28 | 2 |
| PLUG THERMO COUPLE PORT | 16-103163B01 | 5 |
| SLEEVE CONNECTOR 1. | 16-117265B01 | 5 |
| STOP-DISC BOAT R.F CONTACT | 16-117278B01 | 10 |
| INPUT/OUTPUT BOARD | 400159-001 | 2 |
| MEFER RELAY MOD | 49-106663A01 | 15 |
| RELAY DPDT 120VAC | 44-105224A53 | 2 |
| TIMING BELT (C TO C) | 75-10-60Z(W) | 5 |
| EPROM(CVE) | 36-109620A34 | 3 |
| OPTO ELECTRICAL RELAY | 77-106770A02 | 4 |
| RELAY OPTO ELECTRICAL | 77-106770A08 | 4 |
| MOTOR SERVO DC (X) | 808-053-004 | 7 |
| MTR ASSY,P/R-WL | BM01909 | 2 |
| PADDLE VACUUM PRI FOR 100MM WAFERS | 78-120442A03 | 2 |
| SOLENOID VALVE(3WAY) | 50-106203A12 | 11 |
| VALVE AIR OPERATOR(CVE) | 50-108456A31 | 1 |
| O-RING VITON | 60-106206A12 | 18 |
| O-RING VITON | 60-106206A28 | 10 |
| O-RING VITON | 60-106206A10 | 12 |
| OPERATION PANEL | 75-106843A02 | 1 |
| O-RING VITON | P-355 | 5 |
| ASS'Y PARTICLE TRAP | KF2T-4171-016S0 | 1 |
| BOAT RF CONNECTOR C | KF2T-4191-013G0 | 44 |
| ROD-5/16 DIA | KF2T-4061-009C2 | 4 |