| < PHOTO TEL TRACK > | ||
| Description | Part Number | Qty |
| BEARING | 022-100806 | 5 |
| BEARING | 022-101190-1 | 4 |
| TIMING BELT(037-XL-285-0) | 023-101055-1 | 4 |
| CAP SCREW(M3X10 SUS304) | 020-000009-1 | 3 |
| COUPLER(SS-00MP) | 028-006883-1 | 10 |
| POWER SUPPLY DC S82J-2224 | 039-822090-1 | 1 |
| POWER SUPPLY ED-5-1515 | 039-515957-1 | 1 |
| SWITCH PHOTO ELECTRIC | 036-100387-1 | 1 |
| FILTER PART,WCDSCLB01 | 024-003376-1 | 1 |
| REGULATOR PYM20-X | 024-006756-1 | 4 |
| REGULATORT RV-TKER-1-2 | 024-002626-1 | 1 |
| MANUAL VALVE | 024-001059-1 | 1 |
| VALVE MECHANICAL, 3V | 012-000086-1 | 1 |
| VALVE NEEDLE PNDP-W2B-TE | 012-002403-1 | 6 |
| VALVE OPE FPR-91-12.7 | 012-000173-1 | 1 |
| VALVE OTHER TYPES SS-4CA-KZ-3 | 012-000379-1 | 7 |
| VALVE SOL NEDDLE | 012-004183-1 | 1 |
| VALVE SOL VJ314MY-6LOZ-X42 | 012-002292-1 | 1 |
| VALVE SOL VV5J3-32-03-X227 | 012-001818-1 | 2 |
| VALVE SOL,V-VV3J3-2-3CL2-B0 | 012-003014-1 | 5 |
| O-RING BUTYL | 027-101832-1 | 10 |
| O-RING BUTYL | 027-001465-1 | 10 |
| O-RING BUTYL | 027-001405-1 | 10 |
| O-RING VITON | 027-000313-1 | 10 |
| O-RING PFP-9 BLK | 027-101594-1 | 10 |
| O-RING PFS-6 BLK | 027-101874-1 | 10 |
| O-RING VITON | 027-100551-1 | 120 |
| O-RING VITON | 027-100572-1 | 20 |
| O-RING VITON | 027-101896-1 | 1 |
| RESIN FITTING(LE-6B) | 028-005315-1 | 32 |
| AIR CYLINDER CDU 20-50D-F9N-XB9 | 024-012606-1 | 1 |
| AIR CYL CDQ2B20-50D-F79-XB9 | 024-011293-1 | 1 |
| AIR CYLINDER CJ2B6-60-XB9 | 024-010718-1 | 6 |
| AIR CYLINDER CQ2B12-30D-XB9 | 024-010707-1 | 6 |
| AIR CYLINDER CX2N15-75 | 024-007453-1 | 5 |
| AIR CYLINDER(TAD16x20) | 024-012802-1 | 10 |
| AIR CYLINDER | 024-001141-1 | 5 |
| AIR CYLINDER | 024-006877-1 | 4 |
| AIR CYLINDER | 024-009533-1 | 5 |
| FLOW METER | 004-010780-1 | 5 |
| FLOW METER | 024-011754-1 | 5 |
| ROTARY ACTULATOR (CRQBW-90) | 024-007112-1 | 4 |
| VACUUM GENORATOR | 1 | |
| NOZZLE, PFJ2850 | 024-012897-1 | 2 |
| NOZZLE, YPAJ73420316SS | 024-012896-1 | 2 |
| CLEAN STICK (TX712 50/1SET) | 070-100096-1 | 2 |
| FUSE SMP32 | 045-000062-1 | 4 |
| MK-8 CHUCK U/D SENSOR | 1386-444579-11 | 1 |
| RRC PUMP SENSOR CABLE#1 | 1386-456611-11 | 3 |
| SCR COVER SENSOR ASSY | 1386-450146-13 | 5 |
| SCR L-ARM UP/DOWN SENSOR | 1386-447879-12 | 5 |
| SCR R-ARM UP/DOWN SENSOR | 1386-450106-12 | 6 |
| SCR UP/DOWN SENSOR CBL | 1386-450107-11 | 4 |
| W/F STAGE SENSOR 2 ASSY | 1386-444209-12 | 1 |
| WAF EDGE SENSOR LIGWT | 1386-444163-13 | 2 |
| W/F EDGE SENSOR RECEIVER | 1386-444165-14 | 3 |
| WAFER STAGE SENSOR 1 ASSY | 1386-444208-12 | 1 |
| INDEXER SIGNAL CABLE | 048-100294-1 | 5 |
| 3P M/A DRIVER I/F BOARD2 | 1381-645459-11 | 2 |
| AC SERVO MOTOR DRIVER | 040-000728-1 | 2 |
| MOTOR DRIVER | 040-000752-1 | 4 |
| M/C DEV N NECTBOARD | 1381-649155-12 | 3 |
| P.C.B | 1380-100591-11 | 1 |
| RRC PUMP CONN BOARD | 1381-658421-11 | 1 |
| RRC PUMP I/F BOARD | 1381-658420-11 | 2 |
| SCR BRUSH R-MON BOARD | 1381-649746-11 | 3 |
| SCR UNIT CONN BOARD | 1381-649745-11 | 2 |
| SCR USER BD MD-715364-73 | 1381-661312-11 | 1 |
| WEE CCD BOARD | 1381-648798-12 | 1 |
| RRC PUMP MOTOR CBL | 1386-456610-11 | 3 |
| RRC PUMP MTR DRIVER CBL#2 | 1386-456609-11 | 3 |
| RRC PUMP MOTOR DRIVER CBL | 1386-456608-11 | 2 |
| SCR BRUSH MOTOR ASSY | 1386-447256-11 | 8 |
| SCR BRUSH MOTOR CABLE | 1386-447259-11 | 3 |
| SCR L-ARM MOTOR ASSY | 1386-447877-11 | 3 |
| SCR R-ARM MOTOR ASSY | 1386-450104-11 | 3 |
| WEE X DRIVER MTR EXT CBL | 1386-450278-11 | 4 |
| TIMING DULLEY (3-18) | 310-449080-3 | 195 |
| TIMING PULLEY (18-5.4) | 310-450134-3 | 30 |
| TIMING PULLEY (3-18-7) | 310-449089-3 | 18 |
| TIMING PULLEY (3-18) | 310-428510-2 | 4 |
| TIMING PULLEY (3-28) | 310-450448-2 | 18 |
| PHOTO INTERROUPTER PS4001 | 067-400020-0 | 43 |
| RRC PUMP RESET S/W | 1386-456618-11 | 3 |
| 3P MA8 WF SENSOR CABLE | 1386-443507-14 | 2 |
| BUBBLR HEAT EXCHANG 3/8 | 1380-001333-11 | 1 |
| CAP SPACER (0.8) | 1910-419133-11 | 23 |
| CASSETTE GUIDE (80M) | 1910-424140-12 | 13 |
| CHUCK (L/R) | 1310-498374-12 | 1 |
| CN-20 CABLE | 1380-101449-11 | 1 |
| CN-20 CABLE | 1380-101467-11 | 1 |
| COOL PIN U/D SENSOR ASSY | 1386-444187-12 | 1 |
| GAP PIN (0.2) | 1910-419152-11 | 8 |
| GAP PIN (0.3) | 1910-419153-11 | 5 |
| GUIDE PIN | 1310-496603-13 | 13 |
| HP HOT PLATE 8CHP-TF-F | 1380-001241-12 | 1 |
| M/A BLOCK RV | 1310-496525-13 | 2 |
| NEDDLE VAVLE BRACKET(R) | 1910-318274-11 | 1 |
| NOZZLE HOLDER | 1910-426244-11 | 10 |
| NOZZLE PIPE(2) | 1910-432352-11 | 5 |
| POSITIONING PIN | 1910-430714-11 | 5 |
| RIZSE NOZZLE | 1910-432345-11 | 2 |
| SCR GATE U/D SENSOR CABLE | 1386-447262-11 | 5 |
| SCR GATE U/D SENSOR CABLE | 1386-447265-11 | 5 |
| SCR L-ARM U/D SENSOR CABLE | 1386-447880-11 | 3 |
| STARTER UL200T | 1380-101082-11 | 1 |
| THERMO PLATE | 1380-090138-11 | 4 |
| THETA STOPPER | 1310-497090-11 | 3 |
| VZ IND WAF POSI SENS ASSY | 1386-451782-11 | 2 |
| WAFER PIN | 1910-423428-11 | 23 |
| WEE SOLENOID ASSY | 1386-453365-11 | 1 |
| WEE THETA DRIVER MOT EXT CBL | 1386-450277-11 | 6 |
| BEARING SUPPORT | 310-490104-3 | 5 |
| BELT HOLDER | 310-490046-1 | 3 |
| PROTECT RING | 1810-323008-13 | 1 |
| CAMSENSOR ASS'Y | 281-600038-2 | 1 |
| CERAMIC PINS 3 DIA DHP | 310-491708-1 | 1 |
| HOLDER | 310-410979-1 | 20 |
| HOLDER | 310-411863-1 | 20 |
| MA PIN | 310-493293-1 | 5 |
| MA PIN | 310-493293-1 | 18 |
| ARM U/D SENSOR HARNESS | 386-441140-4 | 1 |
| ARM Z I/D SENSOR HARNESS | 386-441030-3 | 3 |
| ARM1 IN/OUT SENSOR HARNESS | 386-441142-3 | 1 |
| SENSOR T/F BOARD | 386-440472-2 | 4 |
| VAC SENSOR HARNESS | 386-400600-1 | 1 |
| COOLING UNIT MOTHER B/D ASS | 386-400575-1 | 2 |
| PRESSURE SWITCH BRACKET(2) | 310-411250-1 | 4 |
| SPIN MOTHER BOARD | 381-600230-5 | 1 |
| SPINNER MOTHER BOARD II | 381-630681-1 | 1 |
| UIO/A CONN BOARD | 381-641135-2 | 6 |
| UIO/BS CONN BOARD | 381-642664-1 | 1 |
| SVM DRIVE CABLE(10M) | 386-439511-4 | 1 |
| MAIN ARM Z MOTOR ASSY | 386-439075-7 | 1 |
| MOTOR | 386-439084-2 | 2 |
| MOTOR | 386-439085-2 | 1 |
| SEAL WASHER | 310-437237-1 | 45 |
| SIDE NOZZLE ARM BLCOK | 310-494998-2 | 5 |
| SIDE RINSE ARM BAR | 310-495000-3 | 5 |
| SLIT HOLDER | 310-491626-1 | 5 |
| STAY PIN | 310-492476-1 | 17 |
| ENCODER SLIT | 310-491625-1 | 5 |
| TOP COVER(DEV,AD) | 310-415747-1 | 4 |
| SPN CYLINDER I/O SEN ASSY | 386-439159-3 | 2 |
| 6"NEGA COAT RINSE | 385-302629-6 | 3 |
| 8SPIN S/SOR ASSY | 386-440778-2 | 1 |
| COATER CHUCK UP/DOWN VAC DF | 386-439490-2 | 3 |
| NOZZLE SCAN ASSY | 385-303313-1 | 1 |
| TVME UIO/BS | 381-642277-3 | 2 |
| AIR OPERATION VALVE | AGD11-8R-5 | 1 |
| LAMP (220V) | AHX654M | 66 |
| DISPENSE | AV101 | 3 |
| LAMP | LMH-7FJ GREEN AC22 | 184 |
| FICXIBIC TUBE | STF-004129-1 | 2 |
| W/F ROD(A) | KF2P-2271-014A0 | 8 |
| O-RING KALREZ 2-146 | YY5000430 | 1 |
| DEV.DI SPLAY NOZZLE | OLD | 13 |
| SHAFT B | 310-490038-1 | 3 |
| SPIN SIDE RINSE | 1386-451848-11 | 4 |
| SOG COAT NOZZLE HEAD SENS | 1386-451085-11 | 1 |
| VALVE SOLENOIDE | 012-000529-1 | 1 |
| AIR CYLINDER | 024-011140-1 | 1 |
| 8"WEE LAMP SIGNAL CABLE | 1386-451370-11 | 1 |
| 8"WEE LIGHT SENSOR CABLE | 1386-451371-11 | 1 |
| 8"WEE LAMP AC PWR CBL | 1386-451372-11 | 1 |
| AIR VALVE AMD21-X10 | 024-006946-1 | 1 |
| I/F OPEPANE CONN BOARD #2 | 1381-645732-17 | 2 |
| 1810-424861-11 | 2 | |