| < GCA STEPPER PARTS(3) > | ||
| Description | Part Number | Qty |
| 5" ALIGNER CONTROL BOARD | 028878G1 | 5 |
| 5" PC ASSY ELEV CO BOARD | 028964G1 | 4 |
| 5" COMPUTER CPU BOARD | 38255 | 7 |
| 5" PC ASSY ELEV BOARD | 028533G1 | 4 |
| 5" AU59 LASER COND BOARD | 036041G1 | 4 |
| 5" FORK CONTROL BOARD | 028884G1 | 1 |
| 5" PC ASSY ALIGNE | 028881G1 | 1 |