| < PHOTO ULTRA TECH STEPPER > | ||
| Description | Part Number | Qty |
| ALIGNMENT ANALOG P.C.B | 03-20-01321 | 1 |
| ALIGNMENT P.C.B | 03-20-01933(ASH 5 AXIS) | 1 |
| PMP AMP BOARD ASS'Y | 03-20-02567-01 | 1 |
| BD BREAKOUT WAS 2244I | 03-15-02049 | 1 |
| BD EXPOSURE DETECTOR 2244I | 03-15-02378 | 1 |
| BD TRNSN DRVR STPR WAS 2244I | 03-15-00302 | 1 |
| STAGE HEGIHT ADJUSTER ASSY | 01-20-04293 | 9 |
| OPENER DOOR RET BOX | 10-15-02218 | 6 |
| POST SPRING | 84-20-02675 | 10 |
| SPRING COMPRESION SST | 84-15-02952 | 10 |
| SPRING COMPRESSION SST | 84-15-02954 | 10 |
| SPRING COMPRESSION | 84-15-02997 | 10 |
| SPRING CPRSN | 84-20-02936 | 10 |
| SPRING EXT | 84-15-02197 | 10 |
| SPRING EXT | 84-15-02369 | 10 |
| SPRING EXT | 84-15-02376 | 10 |
| SPRING EXT | 84-15-02502 | 10 |
| SPRING EXT | 84-15-03765 | 10 |
| SPRING EXT | 84-20-03653 | 10 |
| SPRING EXTENSION SST | 84-15-02953 | 10 |
| SPRING FOCUS ACTUATOR | 84-20-02647 | 10 |
| SPRING XY | 84-15-02182 | 10 |
| PMT TUBE | 3903-000001 | 9 |
| SYSTEM BOARD | CPU-8031 | 1 |
| POWER SUPPLY | ES-9-12 | 1 |
| DIODE PHOTO | 73-15-01734 | 5 |
| SPR COMP | 84-20-02746 | 11 |
| SPR COMP | 84-20-03163 | 10 |
| O-RING VITON | 52-20-03380 | 5 |
| O-RING VITON | 52-20-02761 | 5 |
| O-RING VITON | 52-20-02762 | 5 |
| O-RING VITON | 52-20-04488 | 5 |
| O-RING VITON | 52-20-02698 | 5 |
| O-RING VITON | 52-20-02705 | 5 |
| O-RING VITON | 52-20-02706 | 5 |
| O-RING VITON | 52-20-02707 | 5 |
| SYSTEM BOARD | INPUT | 1 |
| SYSTEM BOARD | OUTPUT | 1 |
| MENIUM AIR BEARING ASSY | 0535-577300 | 2 |
| THETA BEARING ASSY | 0505-364300 | 2 |
| THETA BEARING SPR | 1005-299800 | 2 |
| BLAST SHIELD WINDOW FUSED SILICA | 1064-700108 | 2 |
| ADJUST GUIDE BEARING | 0556-654100 | 3 |
| FIXED GUIDE BEARING | 0556-654200 | 3 |
| ADJUST GUIDE BEARING | 0556-654300 | 3 |
| FEMALE 1/8 CLIPLOCK BARB | 0522-880201 | 1 |
| CBI 16 BIT HP5061 CABLE | 0516-496900 | 1 |
| ALIGNMENT INTERCO CABLE | 0556-701145 | 1 |
| UMBILICAL CONNECT | 1054-610700 | 3 |
| LAMP POWER CONNECT | 0556-700583 | 2 |
| JUMPER CABLE | 0556-700342 | 1 |
| LONG EXTENDER CABLE | 0556-700342 | 1 |
| COMPUTER CABLE (H/P) | 0509-285400 (2902-000018) | 1 |
| 82 BIT INTERFACE CABLE | 0509-290800 | 2 |
| CABLE, FOCUS CONTROL ASSY | 0556-636500 | 2 |
| CERAMIC STAND OFF | 6805-000008 | 10 |
| FEMALE 1/8 CLLIPLOCK | 2522-830201 | 1 |
| CHUCK VAC SOLENOID | 0556-594600 | 1 |
| LOWER END CAP | 1026-517000 | 1 |
| THETA DRIVE LINK | 0556-700868 | 1 |
| PULLEY DRIVE | 1052-680300 | 3 |
| PNEUMATIC PANEL B/D ASSY | 0553-593800 | 1 |
| DETECTOR BOARD HA | 0553-696700 (0553-622100) | 1 |
| 25MM DIA MIRROR | 3803-000005 | 2 |
| EXPOSURE DETECTOR | 4805-000005 | 1 |
| 2 MICRON CARTHIDGE FILTER | 2602-000023 | 1 |
| FILTER 506 SINTER | 2602-000018 | 3 |
| AIR FILTER | 2602-000021 | 3 |
| BRONZE INTAKE FIL | 57-08-00630 | 4 |
| BLUE FILTER | 1056-643400 | 4 |
| FAB, WINDOW SEA 13 | 1064-700210 | 2 |
| FIXED GUIDE BEARING | 0556-654000 | 2 |
| RETICLE GUIDE | 1029-506200 | 2 |
| 6 INCH AUTO UNIFORMITY CHUCK | 01-05-00189 | 1 |
| ILLUMINATOR LAMPHOUSETP | 0554-603400 (0552-671000) | 1 |
| FAB WINDOW MIRR CELL | 3803-000009 | 1 |
| MOTOR STEP CONVEY | 1032-573600 | 2 |
| LEFT WINDOW MOTOR | 0306-245100 | 1 |
| RIGHT WINDOW MOTOR | 0506-245100 | 2 |
| SHUTTER MOTOR ASSY | 01-06-00199 | 1 |
| MAGTECH SERVO MOT = BRUSH ASSY INLAND | 50-02-00334 | 4 |
| ELIPSOIDAL MIRROR 1 | 0554-700584 | 2 |
| MANIPULATOR | 2509-000041 | 2 |
| 5-RING REPLACEMENT KIT | 07-08-00782 | 3 |
| FOCUS PLATE (UT-1 | 1009-446500 | 2 |
| DEWEL PIN | 86-05-00002 | 5 |
| PLCX LENS | 1064-700105 | 2 |
| CHUCK PEDESTAL | 1056-690800 | 2 |
| PRINT CABLE | 62-08-00506 | 1 |
| NINIATURE REL REGULATOR | 2532-000002 | 1 |
| VACUUM REGULATOR | 2532-000003 | 1 |
| FOCUS REGULATOR | 2532-000007 | 1 |
| 0-5 PSI REGULATOR | 2532-000009 | 2 |
| 1/2-30 PSI REGULATOR | 2532-000010 | 1 |
| DETECTOT RECEIV 10780C | 3806-000003 | 1 |
| SOLENOID ROTARY | 4501-000008 | 2 |
| ASSY PB, OAI HL | 0509-537800 | 1 |
| SUBMINIATURE VACUUM | 5106-000010 | 1 |
| 2 MICRO SWITCH | 5107-000006 | 3 |
| ACTINIC SHUTTER B | 1064-700290 | 4 |
| OPHCAL EDGE SWITCH | 5109-000021 | 1 |
| SOLENOID EDGE SWITCH | 0556-594500 | 1 |
| THETA HOME SWITCH | 01-03-00762 (01-08-00762) | 10 |
| MIR HYBRID SERVO | 0515-410700 | 1 |
| FINGER SHAFT | 1056-596300 | 1 |
| GUIDE BEARING, SHA | 0525-596500 | 1 |
| Y-EDGE S/W SENSOR | 0553-627200 | 2 |
| X-EDGE S/W SENSOR | 0553-627300 | 2 |
| PHOTO CONVERGENT SEN | 3806-000028 | 1 |
| SCREW SOC HEXSCTA | 8331-000428 | 6 |
| TEFLON ISOLATION S | 1056-629300 | 3 |
| WAS SLIDER (40 PITCH) | 0509-290800 (01-06-00021) | 1 |
| ACTINIC SHUTTER | 01-08-00548 (01-08-00961) | 1 |
| CHUCK SPACER | 1056-690700 | 2 |
| TEMP PROBE NEW (AD590) | 2901-000021 | 1 |
| 3-WAY SOLENOID VA | 2533-000006 | 2 |
| 2-WAY SOLENOID VA | 2533-000007 | 1 |
| 6 INCH FROSTY WAFER | 0609-491500 (07-08-00882) | 1 |
| BOARD, GENERAL I/O, M | 03-20-01082 | 1 |
| LASER, TRANSDUCER HP5517C | 20-15-02130 | 1 |
| VEXTA MOTOR(M/N:A3227-9212) | 2522-035002 | 1 |
| STAGE SERVO MOTOR | 01-02-00330 | 2 |
| BD,AMP,STPR.MOT,DRVR. | 03-20-00933 (-02) | 2 |
| UT SHUTTER FILTER | 1024-562200 | 4 |