| < DRY ETCH TOK TUE-1112 > | ||
| Description | Part Number | Qty |
| SOLID CAPA CITOR | 6KV-1000PF | 6 |
| MAIN CPU BOARD | 3-H6419 | 1 |
| FOR MAIN CONTROLLER | 8604-010-52-1 | 1 |
| SOLID CPPA CITOR | 8KV-1000PF | 4 |
| ADJUST SCREW | MP-4-07903 | 2 |
| AL SCREW | MP-4-09857 | 3 |
| BELLOWS (PIE37*27,STROKE) | MP-3-08260 | 1 |
| BELLOWS(PIE150*110) | MP-3-20515 | 1 |
| WAFER CLAMPER(CERAMIC 6") | MP-2-13560 | 2 |
| POWER SUPPLY | P15-5 | 5 |
| O-RING TEFLON | MP-3-00211 | 5 |
| CHAMBER COVER | MP-4-08776 | 1 |
| CHAMBER SPACER | MP-3-08775 | 2 |
| ISOLATION RING | MP-2-03421 | 2 |
| SUB TABLE SHAFT | MP-4-08261 | 8 |
| WAFER TABLE (6") | MP-3-14270 | 3 |
| WINDOW GLASS | MP-4-08777 | 4 |
| BEAM SENSOR | SS2-300F | 2 |