| < DRY ETCH TEL > | ||
| Description | Part Number | Qty |
| PHOTO SENSOR | EE-SX672A(OMRON) | 1 |
| BEARING. 7008A | 022-101609-1 | 5 |
| BEARING | 022-100303-1 | 10 |
| DRY BEARING | 022-100350-1 | 70 |
| LM GUIDE | 018-000266-1 | 4 |
| LM GUIDE | 018-000290-1 | 4 |
| LM GUIDE | 018-000296-1 | 4 |
| BELT TIMING | 023-000032-1 | 15 |
| TIMING BELT | 023-100926-1 | 7 |
| SPRING | 025-100275-1 | 55 |
| SENSOR PRESSUE CE10-S02-VCR | 036-002147-1 | 1 |
| SENSOR(HPFS013/FORK | 036-002789-1 | 2 |
| POWER SUPPLY EWS50-15 | 039-501034-1 | 2 |
| POWSTI SUPPLY EWS50-12 | 039-501860-1 | 2 |
| SWITCH PROXIMITY GXL-8FB | 036-003247-1 | 2 |
| VALVE LEAKED FGL 11-X1 | 012-002431-1 | 1 |
| VALVE MTRG. FUBFN-71M-6.35 | 012-000187-1 | 2 |
| O-RING VITON | 027-000782-1 | 5 |
| O-RING VITON | 027-000787-1 | 5 |
| O-RING VITON | 027-000831-1 | 5 |
| O-RING VITON | 027-000850-1 | 3 |
| O-RING VITON | 027-100317-9 | 20 |
| O-RING VITON | 027-100396-9 | 20 |
| O-RING VITON | 027-100431-9 | 21 |
| O-RING VITON | 027-101034-9 | 20 |
| O-RING VITON | 027-102292-9 | 21 |
| FITTING TUBE PL6-01M | 028-001988-1 | 10 |
| FASTENER C-1077-A | 026-101232-1 | 6 |
| GAS SPRING KM150-40-F | 025-100634-1 | 4 |
| SPRING PIN | 021-000502-1 | 2 |
| INDEX #1 CARRIER SENSOR ASSY | 1886-455168 | 2 |
| L/L WAFER SENSOR ASSY | 1886-455231-11 | 5 |
| WAFER OUT SENSOR AMP | 1886-458192-11 | 2 |
| CHAM INT-CONN BOARD | 1881-622048-11 | 1 |
| DC AFN MD925A12 | 040-925795-1 | 10 |
| P/C WALL HEATER ASSY | 1886-455446-11 | 12 |
| ATC H/P CHUCK ASSY | 1886-456040-14 | 2 |
| BUS BAR-8K | 1810-424737-11 | 4 |
| BUSH P-PIN A(DRM) | 1D10-402032-11 | 6 |
| FLAG WHEEL | 1810-424878-11 | 2 |
| HOUSING 2(8K) | 1810-221269-12 | 1 |
| HOUSING P1(DRM2) | 1D10-100315-13 | 4 |
| P/C HIGH RING | 1885-020831-15 | 1 |
| PANEL DOOR | 1810-323398-11 | 5 |
| PIN RF (DRM2) | 1D10-401991-12 | 4 |
| PLATE RF P1(DRM2-P60) | 1D10-100384-11 | 5 |
| PRESSURE S/W | 1887-421121-11 | 5 |
| PULLEY R80 | 1810-424877-11 | 1 |
| SUPPORT GUIDE (8K) | 1810-425080-12 | 5 |
| D/A BLOW PIPE | 810-420984-1 | 4 |
| SEALED PIPE(5KB) | 810-423466-3 | 4 |
| EXHAUST FILTER | 810-421778-1 | 4 |
| FILTER ADPTR | 810-424087-2 | 2 |
| LXC-2-20-20-RS9-2-A CYLINDER | 880-020530- | 2 |
| AC POW FAIL DET BRD 2 | 881-621140-5 | 2 |
| AXIS MOUNTING BLOCK | 810-220291-1 | 2 |
| BACKUP RING | 810-422081-1 | 10 |
| BELLOWS GUARD RING | 810-321183-2 | 1 |
| BOTTOM INSULATOR(5KB) | 810-220497-6 | 1 |
| CAP | 810-423942-1 | 2 |
| FILTER | FUFL-915-6.35-10 | 4 |
| COOLING BLOCK A1 | 810-321187-2 | 2 |
| COOLING BLOCK C1 | 810-424515-1 | 2 |
| DUMPER | 810-424024-1 | 18 |
| EXHAUST RING(PTFE) | 810-220725-2 | 2 |
| FLG MTG 5KB | 810-423482-1 | 6 |
| FPR-80-12.7-JVXF-DDU | 880-020159-1 | 2 |
| GAS INLLET HOLDER(8K) | 810-424147-2 | 12 |
| GATE BACKUP RING | 810-420197-1 | 1 |
| GATE ROLLER | 810-424025-1 | 17 |
| GATE SEAL PLATE | 810-420198-1 | 6 |
| GATE STOPPER(1) | 810-220649-1 | 10 |
| GATE STOPPER(THETA) | 810-220647-1 | 2 |
| GATE | 810-220644-1 | 3 |
| HOOK(BOTTOM) | 810-424027-1 | 8 |
| HOOK(TOP) | 810-424026-1 | 8 |
| HOUSING HOLDER 5KB | 810-220490-2 | 2 |
| LIFTER SUPPORT (8K) | 810-424125-4 | 1 |
| LINKAGE | 810-424023-1 | 21 |
| LM GUIDE INDEXER | 880-020223-2 | 2 |
| LM GUIDE RSR12WMUUC | 880-020192-2 | 2 |
| MTG INSULATOR (8K) | 810-424121-2 | 10 |
| OUTER GATE (8) ASS'Y | 810-423936-1 | 13 |
| REAR WINDOW | 810-420326-1 | 4 |
| SCREW CAP(M4) | 810-400438-1 | 10 |
| SCREW STOPPER | 810-420176-4 | 6 |
| SEAL HOLDER(A) | 810-423938-1 | 3 |
| SEAL HOLDER(B) | 810-423939-1 | 3 |
| TMP600 EXT. BAT | DC48V 4A | 8 |
| SHAFT GAIDE | 810-420071-1 | 4 |
| SHAFT(B) | 810-423937-1 | 13 |
| SHIELD COVER | 810-423738-2 | 2 |
| SLIDER(THETA) | 810-220645-1 | 1 |
| SPEACON BLAKET ASS'Y | 885-426930-4 | 1 |
| SREW BALL | 802-320006-1 | 5 |
| THRUST WASHER | 810-420201-2 | 32 |
| TSBC-ACRTC | 881-520160-9 | 1 |
| WINDOW | 810-424086-2 | 2 |
| FORK | 023-001448-1 | 1 |
| PHOTOELECTRIC SW AMP | 036-002384-1 | 4 |
| 810-42486-11 | 2 | |