| < DRY ETCH LAM-RAINBOW > | |||
| Description | Part Number | Qty | |
| MANOM CAP 10T | 685-093283-001 | 1 | |
| PUSHBUTTON ROUNF | 661-007798-001 | 20 | |
| TOOL,DOMED ELECTRODE LEVELING | 515-011835-001 | 5 | |
| BEARING LATCH SOLENOID | 715-012254-001 | 30 | |
| BEARING LINEAR | 746-090634-001 | 3 | |
| SPACERS PRECSSION BEARING | 715-012156-001 | 3 | |
| BRACKET GAS SPRING LEFT | 715-031459-001 | 4 | |
| BRACKET GAS SPRING RIGHT | 715-031459-002 | 4 | |
| BUMBER GAS SPRING BRACKET | 713-11093-001 | 20 | |
| MOUNT GAS SPRING(LEFT) | 715-31527-001 | 20 | |
| MOUNT GAS SPRING(RIGHT) | 715-31526-001 | 17 | |
| COMPRESSION845DD2"FL | 754-008953-006 | 5 | |
| SPRING EXTENSION1 1/8"F.L | 754-008544-001 | 10 | |
| CLAMP 2" LOADLOCK MANIFOLD | 715-25757-001 | 2 | |
| BRACKET SENSOR LONG | 714-012148-001 | 2 | |
| BRACKET SENSOR SHORT | 714-012149-001 | 2 | |
| FLAG PHOTOSENSOR GAP | 715-011171-001 | 5 | |
| FLAG, CAL SENSOR 7CM GAP | 714-011075-002 | 4 | |
| EPROM SPECIAL | 631-091681-001 | 6 | |
| ASS'Y PCB PHASE & MAG DECTOR | 810-08582-0 | 1 | |
| PCB DIP DSQ MATCH | 810-017057-001 | 2 | |
| PCB DPTP MOUNTING 16 | 810-550068-001 | 5 | |
| PCB OPTO-22 TRANSTION | 810-400006-001 | 5 | |
| PCB CONTROLLER BOARD | 810-017048-001 | 2 | |
| PCB E-NET INT | 605-092550-001 | 4 | |
| PCB, DRAM SIMMS, 16MB | 605-092874-001 | 2 | |
| CAPACITOR MANOMETER | 685-093282-001 | 1 | U1 |
| ASSY SPINNER MOTOR 4600 | 853-15759-002 | 3 | |
| RADIAL MOTOR ASSY | 853-550095-001 | 1 | |
| CUP FUSE | 670-08800-001 | 10 | |
| ASSY CAM LIMIT SWITCH | 854-31692-001 | 3 | |
| ASSY FLOW SWITCH N2 | 853-015767-001 | 21 | |
| BOX RF SWITCH | 714-17158-001 | 3 | |
| BRACKET LIMIT ACTUATOR | 714-011072-001 | 5 | |
| FUSE 250V 1A | 670-06780-022 | 1 | |
| FLOW SWITCH | 853-015775-001 | 14 | |
| 50W VDC 0.1 | 649-08126-104 | 13 | |
| CONNECTOR 50AMP PEMAIL | 668-007970-002 | 5 | |
| ASSY DI FILTER | 853-10143-001 | 2 | |
| FILTER,BODY | 775-09929-001 | 4 | |
| ASSY SOL VALVE N2 JET | 853-15770-001 | 20 | |
| HEATER 10W | 678-092386-003 | 1 | |
| HEATER 120V 300W | 678-092386-001 | 2 | |
| HEATER THERMOFOIL 123OHM | 678-08923-001 | 4 | |
| HEATER THERMOFOIL 1530HM | 678-08922-001 | 4 | |
| HEATER | 678-092386-002 | 1 | |
| TEFLON VALVE | 722-90514-001 | 53 | |
| VALVE SOLENOID 2-WAY N/C | 766-009724-001 | 4 | |
| WIRE 18AWG TEFLON BL | 681-90076-010 | 1 | |
| O-RING VITON | 734-007330-001 | 39 | |
| O-RING VITON | 734-061280-386 | 59 | |
| O-RING VITON | 734-000690-001 | 30 | |
| O-RING VITON | 734-060327-001 | 10 | |
| STEPPING MOTOR | 676-08382-001 | 3 | |
| AMPLIFIER MODULATECT | 685-08396-001 | 8 | |
| FLOW SWITCH ADJUSTABLE | 645-00247-004 | 8 | |
| O-RING VITON | 734-000799-001 | 7 | |
| FITTING BOTTOM GAS FEED | 839-330016-001 | 3 | |
| FITTING BOTTOM GAS FOOD RING | 715-330016-001 | 3 | |
| ADIO #11 PIGGY BACK | 810-17052-011 | 6 | |
| ADIO #13 PIGGY-BACK BD | 810-17052-013 | 6 | |
| ANODE(4600) | 715-11639-006 | 3 | |
| ASS'Y WATER V/V DI HOT | 853-10144-001 | 2 | |
| ASS`Y LOW FREQUENCE,MATCH | 853-17400-001 | 1 | |
| ASSY HARN TC4 INTERFACE | 853-17988-030 | 1 | |
| ASSY HARNESS HIVOLTAGE ESC | 853-190313-001 | 2 | |
| ASSY RBN CA 25P | 853-034125-001 | 2 | |
| ASSY RBN CA 37P | 853-034124-001 | 2 | |
| ASSY WAFER HOLDER TIGHT POCKET | 853-12176 | 1 | |
| AUTOTUNE MATCH STRIP ASSY | 853-25735-001 | 1 | |
| BLANK OFF NW25 | 796-009363-003 | 3 | |
| BOT HSG SPLIT CHAMBER | 715-330235-001 | 1 | |
| BOT HSG UPR CHAMBER | 715-330331-001 | 2 | |
| BRACKET BYP CAP ESC 8" | 715-140111-002 | 2 | |
| BRACKET MNTG PHOTO | 714-011170-001 | 8 | |
| CABLE MANOMETER | 853-07719-001 | 2 | |
| CAP ELECTRODE 6" 50M GROOVE | 715-011639-016 | 4 | |
| ELBOW STREET 1/8 NPT | 921-000802-002 | 10 | |
| DI CARIRIDGE M&W | 775-009688-001 | 12 | |
| E-RING .125SST | 726-007985-003 | 20 | |
| FILLER | 715-11219-001 | 23 | |
| FUNNEL,QUARTZ | 716-021323-002 | 3 | |
| CAP LOWER ELECTRODE 6" | 715-031752-306 | 1 | |
| QUICK CONNECT | 921-09613-001 | 2 | |
| GAUGE VAC MINI CONVECTRON | 771-090920-003 | 1 | |
| HARN, CHMBR SGNL RETROFIT | 853-23620-001 | 2 | |
| HEAT SINK "A" | 715-17342-001 | 4 | |
| HEATED ROUGHING MANIFOLD | 853-032938-001 | 1 | |
| HIGH TEMP PADDLE | 853-347146-008 | 1 | |
| PUMP MOTOR | 676-024624-001 | 4 | |
| JOINT UNIVERSAL | 749-08731-001 | 3 | |
| LABEL BLANK | 785-005639-001 | 5 | |
| PACKING | FG-40S (23TH) | 2 | |
| LINER | 714-330829-001 | 4 | |
| LOWER ELECTRODE | 715-18611-108 | 1 | |
| PRECUT KAPTON TAPE | 716-011653-001 | 61 | |
| R,UPPER CHAMBER FXD GAP-2 | 715-330133-001 | 3 | |
| RING BOTTOM GAS FEED | 715-330024-002 | 2 | |
| RING EDGE | 716-28396-001 | 1 | |
| RING ELECTRODE FILLER | 715-11914-001 | 6 | |
| RING FUCUS | 713-011666-006 | 1 | |
| RING GAS FEED FLG | 715-350036-001 | 4 | |
| RING ORILICE | 715-11059-001 | 1 | |
| RING,CONFINEWENT | 713-028553-001 | 2 | |
| SCR,SOCHD,VENTED 4-40*.25 | 796-08353-002 | 3 | |
| SCREW FL HD | 720-90896-006 | 10 | |
| SCREW FLATHD VENT | 796-08918-007 | 10 | |
| SCREW SOC HD KEL-F | 720-09410-012 | 50 | |
| SCREW SOCKET | 720-060824-024 | 12 | |
| SCREW SOCKETHEAD CAP | 720-00960-020 | 7 | |
| SCREW WINDOW HTD EPD | 714-330356-001 | 10 | |
| SCREW,SOC HD KEL-F | 720-09410-008 | 16 | |
| SEAT LENDS EIP | 715-18928-001 | 1 | |
| SHLD WDO UV HTD | 713-330374-004 | 20 | |
| SHLD WINDOW UV HTD | 713-330374-001 | 9 | |
| SPACER .252*50 ALUM | 723-09178-007 | 10 | |
| SPACER QUARTZ | 716-011493-003 | 2 | |
| STRIKE LATCH | 726-01514-001 | 7 | |
| VDS TEMP CONT UNIT | 778-090791-004 | 8 | |
| VTR/MTR 5 ENCODER | 810-550092-001 | 2 | |
| WASHER FLT #2 SST | 721-00916-001 | 8 | |
| WASHER INSULATOR MACH BOX/ | 713-15097-001 | 12 | |
| WASHER | 721-00936-001 | 4 | |
| WELDMENT HE&VAC TUBE | 839-24498-100 | 2 | |
| WELDMENT LL VAC GUAGES/LL | 839-011237-001 | 1 | |
| RANDANRING | FG-40S(20TH) | 2 | |
| SEAL | FG-40S (19TH) | 2 | |
| BACK RUBBER CASING | FG-40S-13 | 1 | |
| ELBOW MALE 1/8NPT*32T | KQL03-34S | 50 | |
| (S)RING,EDGE 8"WAFER | 715-030106-008 | 1 | |
| ELB MALE S/W SST | 921-097323-001 | 1 | |
| CYLINDER | 770-009005-001 | 4 | |
| IC ADIO BUFFER HCT 374 | 631-07367-374 | 50 | |
| O-RING | 734-08546-001 | 42 | |
| FILTER OPTICAL 840NM | 795-90154-001 | 1 | |
| BRG WHL GDE 250MM | 746-097904-001 | 8 | |
| SHIELD LINE | 739-S009053-001 | 2 | |
| SPRAL WARP TEFLON 3/8 | 686-008917-002 | 1 | |
| SHAFT DRIVE ARM | 715-006551-001 | 3 | |
| HOUSING SEAL QUAD RING HOWER | 715-006602-001 | 7 | |
| 713-028553-001 | 2 | ||
| LONG'S MFG | 715-30079-1-1 | 5 | |
| PLUG GAP GAUGE | 713-010221-003 | 4 | |
| BASE GAP GAUGE | 713-010222-003 | 4 | |
| FLOWMETRE VETICAL PORT | 771-06781-026 | 7 | |
| ASSY, THERMOCOUPLE | 853-53545-001 | 1 | |
| VAC SWITCH | 853-57124-001 | 1 | |