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DRY ETCH ASPEN > |
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Description |
Part Number |
Qty |
ASSY PCB ANALOG OUT |
065-25000-00 |
1 |
ASSY DC
POWER SUPPLY |
063-00000-00 |
1 |
ASSY CBL
68CC IB TO MFC PCB |
182-42000-04 |
1 |
ASSY PCB
WAFER SENSE REV:01 |
190-90000-00 |
1 |
ASSY
MOTOR CONTROL PCB |
246-92000-00 |
1 |
ASSY
CBL-506 PC TO TP REV:1 |
146-20000-06 |
1 |
ASSY
CBL-507 PC TO TP REV:1 |
146-20000-07 |
1 |
ASSY
CBL-516 TP TO IB REV:1 |
146-21000-06 |
1 |
ASSY
CBL-517 TP TO IB REV:1 |
146-21000-07 |
1 |
ASSY
CBL-532 COMP TO ANA FLT |
146-23000-0 |
1 |
PADDLE
BLOCK REV:01 |
134-00009-00 |
3 |
SDU
VN-520 COMP TO ANA FLT |
146-22000-00 |
1 |
PCB A
ANALOG INPUT |
290-0602 |
2 |
ASSY
SHUTTLE LIFT MOTOR |
41-21000-00 |
1 |
BEARING
.375*875MPB SR 3R7 |
910-10008-00 |
2 |
BEARING
0625*1.0625MPB |
910-10007-00 |
2 |
BEARING
1.000*1.375KAY DON |
910-10009-00 |
2 |
BEARING
1.0625*1.500*281 NHBB |
910-10005- |
2 |
PIRANI
GAUGE |
440-0001 |
1 |
FILTER |
914-91003-00 |
1 |
O-RING
VITON |
913-10023-00 |
5 |
O-RING
VITON |
913-10027-00 |
20 |
O-RING
VITON |
913-10052-00 |
4 |
AIR
FILTER |
APX-X015 |
12 |
CONTROL
BOARD |
ABX-X228 |
1 |
COUPLING
REV:01 |
911-12003-00 |
1 |
HV MODULE |
APX-X117 |
1 |
SCREW FL
HD PH 4-40*5/8 |
915-12013-00 |
104 |
SCREW FL
HD PH 8-32*3/4 |
915-12009-00 |
63 |
SCREW FL
HD. PH 4-40*3/16 |
915-12008-00 |
64 |
SCREW FL
HD.SS 8-32*1 1/4 |
915-12013-00 |
20 |
SCREW SC
HD SS 10-32*3/4 |
915-10014-00 |
20 |
SCREW SC.
HD.SS 10-32*1/2 |
915-10012-00 |
63 |
SOURCE
DRIVER |
ARX-X209 |
1 |
SOURCE
WATTMETER |
ARX-X213 |
1 |
O-RING
VITON |
913-10002-00 |
3 |
ASSY
CBL-532 COMP TO ANA FLT |
146-23000-0 |
1 |
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