| < DRY ETCH ASPEN > | ||
| Description | Part Number | Qty |
| ASSY PCB ANALOG OUT | 065-25000-00 | 1 |
| ASSY DC POWER SUPPLY | 063-00000-00 | 1 |
| ASSY CBL 68CC IB TO MFC PCB | 182-42000-04 | 1 |
| ASSY PCB WAFER SENSE REV:01 | 190-90000-00 | 1 |
| ASSY MOTOR CONTROL PCB | 246-92000-00 | 1 |
| ASSY CBL-506 PC TO TP REV:1 | 146-20000-06 | 1 |
| ASSY CBL-507 PC TO TP REV:1 | 146-20000-07 | 1 |
| ASSY CBL-516 TP TO IB REV:1 | 146-21000-06 | 1 |
| ASSY CBL-517 TP TO IB REV:1 | 146-21000-07 | 1 |
| ASSY CBL-532 COMP TO ANA FLT | 146-23000-0 | 1 |
| PADDLE BLOCK REV:01 | 134-00009-00 | 3 |
| SDU VN-520 COMP TO ANA FLT | 146-22000-00 | 1 |
| PCB A ANALOG INPUT | 290-0602 | 2 |
| ASSY SHUTTLE LIFT MOTOR | 41-21000-00 | 1 |
| BEARING .375*875MPB SR 3R7 | 910-10008-00 | 2 |
| BEARING 0625*1.0625MPB | 910-10007-00 | 2 |
| BEARING 1.000*1.375KAY DON | 910-10009-00 | 2 |
| BEARING 1.0625*1.500*281 NHBB | 910-10005- | 2 |
| PIRANI GAUGE | 440-0001 | 1 |
| FILTER | 914-91003-00 | 1 |
| O-RING VITON | 913-10023-00 | 5 |
| O-RING VITON | 913-10027-00 | 20 |
| O-RING VITON | 913-10052-00 | 4 |
| AIR FILTER | APX-X015 | 12 |
| CONTROL BOARD | ABX-X228 | 1 |
| COUPLING REV:01 | 911-12003-00 | 1 |
| HV MODULE | APX-X117 | 1 |
| SCREW FL HD PH 4-40*5/8 | 915-12013-00 | 104 |
| SCREW FL HD PH 8-32*3/4 | 915-12009-00 | 63 |
| SCREW FL HD. PH 4-40*3/16 | 915-12008-00 | 64 |
| SCREW FL HD.SS 8-32*1 1/4 | 915-12013-00 | 20 |
| SCREW SC HD SS 10-32*3/4 | 915-10014-00 | 20 |
| SCREW SC. HD.SS 10-32*1/2 | 915-10012-00 | 63 |
| SOURCE DRIVER | ARX-X209 | 1 |
| SOURCE WATTMETER | ARX-X213 | 1 |
| O-RING VITON | 913-10002-00 | 3 |
| ASSY CBL-532 COMP TO ANA FLT | 146-23000-0 | 1 |