| < DRY ETCH AMAT > | ||
| Description | Part Number | Qty |
| ROOF HEATER CGF | 0190-40177 | 1 |
| PUMP PRESS TURBO H20-FRKLN | 0240-01158 | 1 |
| COVER,QUARTZ 150MM | 0200-00042 | 1 |
| CASSETTE INDEXER | 0010-40241 | 1 |
| COVER CLEAR LID,ENHA | 0021-09154 | 1 |
| COVER WROP AROUND QTZ OX | 0200-09346 | 1 |
| KEY-ED GAS TUBE (A2X-A-334) | 0240-00828 (0020-04468) | 6 |
| LINE WATER COLLING IWC | 0040-40379 | 1 |
| POPPET BODDY | 26-83609-00 | 9 |
| INDICATOR LIGHT LED 5TO14 | 662-08324-001 | 12 |
| PRESSURE SWITCH | 33-10006-00 | 2 |
| PRESSURE SWITCH | 33-10044-00 | 4 |
| RETAINER LEFT | 26-82533-00 | 7 |
| RIBBON CASSETTE | B9585SJ | 5 |
| PEN CARTRIDGE | B9586YR (4PCS/EA) | 9 |
| 100WATT SECTION ASS'Y | 3000D | 1 |
| O-RING KALREZ(4079) | AS568A-139 | 2 |
| O-RING KALREZ | AS568A-168 | 2 |
| O-RING VITON | 72-50037-00 | 30 |
| ADAPTER,N-A-JJ | 6561 | 10 |
| EGM(BBCL2)CHEMCASSET | 856052 REV.B | 8 |
| O-RING VITON | 60-106206A55 | 15 |
| GEAR SPUR (36TOOTH) | 73-40033-00 | 3 |
| HOOD | H11 | 1 |
| HOOD | H14 | 1 |
| RF POWER GEN.(13.56KHZ) | CPS1001/13.56 | 1 |
| CLAMP RING | UMP-04016 | 1 |
| VESPEL SCREW | UMP-04019 | 38 |
| FOCUS RING(A-BUTTOM)6" | KF3E-3712-090A3 | 6 |
| FOCUS RING(B-TOP)6" | KF3E-3712-089A3 | 12 |
| OUTTER RING | KF5E-3843-046A0 | 8 |
| FINGER FLANGE | UMP-04018 | 63 |
| REMOVAL FINGER | UMP-05190 | 44 |
| O-RING KALREZ | KDAC-12336 | 3 |
| CLAMP RING | 0020-03416 | 2 |
| RECTIFIER,BRIDGE,35A,600V | 42-1156-010 | 2 |
| VALVE(VCO) | SS-4BKT9AGAA | 1 |
| UP DOWN SENSOR FLAG | 001-9044-01 | 2 |
| PHOTO SENSOR FLAG | 550-0013-03 | 2 |
| SBC SYNERGY BOARD V21 /SV21 | 0090-76110 | 5 |
| SBC SYNERGY BOARD V440 | 0090-76109 | 5 |
| SBC SYNERGY BOARD V452 | 0090-76133 | 3 |
| D-I/O BOARD | 0100-20003 | 1 |
| A-I/O BOARD | 0100-76124 | 1 |
| OMS BOARD | 0190-76005 | 1 |
| SEI BOARD | 0100-20001 | 1 |
| VGA VIDEO BOARD | 0190-76050 | 1 |