| < CVD TOK-SOG TR-6132UD / TR-6191UD > | ||
| Description | Part Number | Qty |
| POWER SWITCH | 01-281 | 9 |
| POWER LAMP | 01-903 | 10 |
| START CAP | 01-951 | 6 |
| POWER CABLE | 5.5M | 1 |
| MOTOR (100V 25W) | 4RK25RGK-AM | 3 |
| SOLENOID VALVE | 1 | |
| IN-PUT PCB | EOR05-2976 | 1 |
| INDICATION PCB | EOR05-2979 | 1 |
| INDICATOR BOARD | EOR05-2979B | 1 |
| LCD CONT.BOARD | EOR05-1813 | 2 |
| MOTHER BOARD | EOR05-1655B | 1 |
| MOTHER BOARD | EOR05-2973 | 1 |
| MOTHER BOARD | EOR05-2974 | 1 |
| PILOT LIGHT | APW111D-H | 3 |
| SPEED CONTROLLER | AS2200-01 | 4 |
| AIR CYLINDER(A80S-X202-X139) | CDQ2B20-10D | 2 |
| SUCK BACK VALVE FITTING(OUT) | 50-2K-S | 8 |
| SUCK BACK VALVE FITTING(OUT) | 50-2K-T | 8 |
| FITING | E1-2N | 2 |
| VACUUM SEAL | EMOR04-026 | 16 |
| GUIDE HOUSING(MR4-1635) | E-1419 | 1 |
| FLOWING JOINT | J15-5-058 | 3 |
| HEATER,CERAMIC | FOR 250C | 4 |
| TIMING BELT | R100S3M384 | 2 |
| MOTOR | PH266-01B | 1 |
| VALVE SOLENOID | PCS241-NB-D24-PR | 3 |
| RULON | ML0810 | 1 |
| ARM UNIT 6" | OBM-3005 | 2 |
| WAFER SEARCH SENSOR | HEAD | 1 |
| VALVE SOLENOID | B5142 M6C3-M5 | 1 |
| HEATER COIL BRACKET | OBM-3005 | 6 |
| ROTARY ACTUATOR | CDRQBW 15-90A | 1 |
| LINEAR ROTARY BEARING=STROKE BEARI | LR 8 | 2 |
| BOARD,SUB CPU | EORO5-1072F-3 | 2 |
| BOARD,STEP MOTOR=PULSE MOTOR DRIV | E0R05-1068C-S | 3 |
| BOARD SENSOR | E0R05-1163 | 1 |
| BOARD SENSOR | EORO4-203 | 1 |
| I/O BOARD | EORO5-2023A | 1 |
| BEARING | LF1680ZZ | 2 |
| MICRO BEARING | 698ZZ | 2 |
| AIR CYLINDER | CQ1B20-10S | 1 |
| PLASTIC BEARING (CBS) | WB626B | 2 |
| MICRO BEARING | 605ZZ | 2 |
| PILLOW BEARING | UP-000 | 2 |
| THERMO COUPLER MOUNTING PCB | EORO5-1638 | 1 |
| BOARD,SUB CPU | EORO5-1072F-3 | 2 |
| WALKING BEAM(6 ZONE), PAIR | 6 ZONE | 2 |
| CAP,PRESSURIZING | TYPE-N | 2 |
| CAP,PRESSURIZING | TYPE-N5 | 4 |
| CAP,PRESSURIZING | TYPE-NA10E | 4 |
| CAP,PRESSURIZING | TYPE-NNA | 2 |
| PRESSURIZING CAP | NA 10 | 19 |
| PRESSURIZING CAP ME TYPE | TYPE-ME | 4 |
| CHUCK SPINDLE | 5. 6" | 3 |
| W/F SPIN CHUCK | KMS00020 | 1 |
| CAP,PRESSURIZING | NA 10 | 20 |
| CIRCUIT PROTECTOR | NRAN3K11-TK1595 | 2 |
| CIRCUIT PROTECTOR | NRAN3100F-20A AA | 2 |
| CIRCUIT PROTECTOR | NRF210-1A | 1 |
| CIRCUIT PROTECTOR | NRF210-3A | 1 |
| CIRCUIT PROTECTOR | NRF210-5A | 1 |
| CIRCUIT PROTECTOR | NRF210-8A | 1 |
| BOARD CONVERTER | EORO5-2708 | 1 |
| BOARD CONVERTER | EORO5-2661A | 1 |
| EXHAUST TRAP P.V.C 6" | MF4-G1051B | 2 |
| E.B.R ASSY UNIT for TR-6132UD | TYPE 2,M TYPE | 1 |
| FILTER | PFFV01D8S | 3 |
| HEATER,CERAMIC | 350 | 6 |
| AC SERVO MOTOR | USAHEM-01-TL11 | 0 |
| AC SERVO MOTOR | USAHEM-01-TL31 | 0 |
| DOUBLE NOZZLE HEAD | AWG18X2 | 5 |
| O-RING | P20 (SILICON) | 2 |
| BAKE PLATE UNIT (350) | T1041 | 1 |
| SENSOR,PRESSURE | PS5-102G | 5 |
| WIRE SENSOR | E52-CA15A649 | 1 |
| MICRO SWITCH =PHOTO SENSOR | EE-SX470 | 1 |
| THERMO COUPLE | E52-CA15A649 | 6 |
| TUBE,TEFLON (1SET) = 2C23-008 | AWG18 X 10M | 6 |
| TERMO COUPLE (INNER) | K1.6/500 SELESE | 3 |
| BAKE PLATE UNIT (350) | T1041 | 1 |