| < DRY ETCH TEGAL > | ||
| Description | Part Number | Qty |
| PIN WAFER LIFT SST | 49-050-001 903EJ | 1 |
| MOD STRR MOTOR | 31-217-001 | 4 |
| STAND OFF | 51-038-003 | 10 |
| PULLEY CASSETTE LOADER | 57-028-001 | 10 |
| PWR SNSR CAL 2-30MHZ BIRD | 31-232-001 | 1 |
| STEPPER MOTOR | 31-217-002 | 6 |
| STP MTR ELVTER | 31-165-006 | 3 |
| METAL PIN 903EJ | 81-007-129 | 21 |
| RING CUT-AWAY4 INTC | 40-395-003 | 3 |
| GASKET R.F CONTACT | 39-761-001 | 61 |
| PLATE TIMES W/RIP | 46-469-002 | 2 |
| RWK-PCB ASSY MEMORY 400K | 80-095-320 | 2 |
| TEMPERATURE READOUT PCB | 81-105-217 | 3 |
| PCB FPI-4 FR PNL INTEL | 99-125-007 | 5 |
| PCB RFG-3 RF GEN INTEC | 99-173-003 | 1 |
| FILTER LT 520NM | 80-506-003 | 6 |
| FILTER LT 704.0NM | 80-506-011 | 3 |
| CABLE (RIBON) | 93-067-001 | 6 |
| CABLE ENDPT J1 16PIN | 93-072-001 | 6 |
| CABLE MTCH NTWK COAXIAL | 93-137-002 | 3 |
| CHILLER CONTROL BOARD | 81-105-201 (PCB-A1 | 2 |
| FILTE LT 704.0NM | 80-506-013 | 3 |
| PAD LVL | 80-200-088 | 4 |
| SPATULA ARM | KF1E-3791-026S0 | 3 |
| COLLAR PIN | KF3E-3771-009S0-1 | 42 |
| PUSH PIN(B) | KF3E-3771-009S0-3 | 3 |
| CABLE VACUUM GAUGE | SERIES 275 | 3 |
| PCB OMD-1 OPTICAL MODULATOR | 99-204-001 | 1 |
| MODEL:M629670 | 31-328-001 | 5 |