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DRY ETCH LAM-RAINBOW > |
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Description |
Part Number |
Qty |
|
MANOM CAP 10T |
685-093283-001 |
1 |
|
PUSHBUTTON
ROUNF |
661-007798-001 |
20 |
|
TOOL,DOMED
ELECTRODE LEVELING |
515-011835-001 |
5 |
|
BEARING
LATCH SOLENOID |
715-012254-001 |
30 |
|
BEARING
LINEAR |
746-090634-001 |
3 |
|
SPACERS
PRECSSION BEARING |
715-012156-001 |
3 |
|
BRACKET
GAS SPRING LEFT |
715-031459-001 |
4 |
|
BRACKET
GAS SPRING RIGHT |
715-031459-002 |
4 |
|
BUMBER
GAS SPRING BRACKET |
713-11093-001 |
20 |
|
MOUNT GAS
SPRING(LEFT) |
715-31527-001 |
20 |
|
MOUNT GAS
SPRING(RIGHT) |
715-31526-001 |
17 |
|
COMPRESSION845DD2"FL |
754-008953-006 |
5 |
|
SPRING
EXTENSION1 1/8"F.L |
754-008544-001 |
10 |
|
CLAMP
2" LOADLOCK MANIFOLD |
715-25757-001 |
2 |
|
BRACKET
SENSOR LONG |
714-012148-001 |
2 |
|
BRACKET
SENSOR SHORT |
714-012149-001 |
2 |
|
FLAG
PHOTOSENSOR GAP |
715-011171-001 |
5 |
|
FLAG, CAL
SENSOR 7CM GAP |
714-011075-002 |
4 |
|
EPROM
SPECIAL |
631-091681-001 |
6 |
|
ASS'Y PCB
PHASE & MAG DECTOR |
810-08582-0 |
1 |
|
PCB DIP
DSQ MATCH |
810-017057-001 |
2 |
|
PCB DPTP
MOUNTING 16 |
810-550068-001 |
5 |
|
PCB
OPTO-22 TRANSTION |
810-400006-001 |
5 |
|
PCB
CONTROLLER BOARD |
810-017048-001 |
2 |
|
PCB E-NET
INT |
605-092550-001 |
4 |
|
PCB, DRAM
SIMMS, 16MB |
605-092874-001 |
2 |
|
CAPACITOR
MANOMETER |
685-093282-001 |
1 |
U1 |
ASSY
SPINNER MOTOR 4600 |
853-15759-002 |
3 |
|
RADIAL
MOTOR ASSY |
853-550095-001 |
1 |
|
CUP FUSE |
670-08800-001 |
10 |
|
ASSY CAM
LIMIT SWITCH |
854-31692-001 |
3 |
|
ASSY FLOW
SWITCH N2 |
853-015767-001 |
21 |
|
BOX RF
SWITCH |
714-17158-001 |
3 |
|
BRACKET
LIMIT ACTUATOR |
714-011072-001 |
5 |
|
FUSE 250V
1A |
670-06780-022 |
1 |
|
FLOW
SWITCH |
853-015775-001 |
14 |
|
50W VDC
0.1 |
649-08126-104 |
13 |
|
CONNECTOR
50AMP PEMAIL |
668-007970-002 |
5 |
|
ASSY DI
FILTER |
853-10143-001 |
2 |
|
FILTER,BODY |
775-09929-001 |
4 |
|
ASSY SOL
VALVE N2 JET |
853-15770-001 |
20 |
|
HEATER
10W |
678-092386-003 |
1 |
|
HEATER
120V 300W |
678-092386-001 |
2 |
|
HEATER
THERMOFOIL 123OHM |
678-08923-001 |
4 |
|
HEATER
THERMOFOIL 1530HM |
678-08922-001 |
4 |
|
HEATER |
678-092386-002 |
1 |
|
TEFLON
VALVE |
722-90514-001 |
53 |
|
VALVE
SOLENOID 2-WAY N/C |
766-009724-001 |
4 |
|
WIRE
18AWG TEFLON BL |
681-90076-010 |
1 |
|
O-RING
VITON |
734-007330-001 |
39 |
|
O-RING
VITON |
734-061280-386 |
59 |
|
O-RING
VITON |
734-000690-001 |
30 |
|
O-RING
VITON |
734-060327-001 |
10 |
|
STEPPING
MOTOR |
676-08382-001 |
3 |
|
AMPLIFIER
MODULATECT |
685-08396-001 |
8 |
|
FLOW
SWITCH ADJUSTABLE |
645-00247-004 |
8 |
|
O-RING
VITON |
734-000799-001 |
7 |
|
FITTING
BOTTOM GAS FEED |
839-330016-001 |
3 |
|
FITTING
BOTTOM GAS FOOD RING |
715-330016-001 |
3 |
|
ADIO #11
PIGGY BACK |
810-17052-011 |
6 |
|
ADIO #13
PIGGY-BACK BD |
810-17052-013 |
6 |
|
ANODE(4600) |
715-11639-006 |
3 |
|
ASS'Y
WATER V/V DI HOT |
853-10144-001 |
2 |
|
ASS`Y LOW
FREQUENCE,MATCH |
853-17400-001 |
1 |
|
ASSY HARN
TC4 INTERFACE |
853-17988-030 |
1 |
|
ASSY
HARNESS HIVOLTAGE ESC |
853-190313-001 |
2 |
|
ASSY RBN
CA 25P |
853-034125-001 |
2 |
|
ASSY RBN
CA 37P |
853-034124-001 |
2 |
|
ASSY
WAFER HOLDER TIGHT POCKET |
853-12176 |
1 |
|
AUTOTUNE
MATCH STRIP ASSY |
853-25735-001 |
1 |
|
BLANK OFF
NW25 |
796-009363-003 |
3 |
|
BOT HSG
SPLIT CHAMBER |
715-330235-001 |
1 |
|
BOT HSG
UPR CHAMBER |
715-330331-001 |
2 |
|
BRACKET
BYP CAP ESC 8" |
715-140111-002 |
2 |
|
BRACKET
MNTG PHOTO |
714-011170-001 |
8 |
|
CABLE
MANOMETER |
853-07719-001 |
2 |
|
CAP
ELECTRODE 6" 50M GROOVE |
715-011639-016 |
4 |
|
ELBOW
STREET 1/8 NPT |
921-000802-002 |
10 |
|
DI
CARIRIDGE M&W |
775-009688-001 |
12 |
|
E-RING
.125SST |
726-007985-003 |
20 |
|
FILLER |
715-11219-001 |
23 |
|
FUNNEL,QUARTZ |
716-021323-002 |
3 |
|
CAP LOWER
ELECTRODE 6" |
715-031752-306 |
1 |
|
QUICK
CONNECT |
921-09613-001 |
2 |
|
GAUGE VAC
MINI CONVECTRON |
771-090920-003 |
1 |
|
HARN,
CHMBR SGNL RETROFIT |
853-23620-001 |
2 |
|
HEAT SINK
"A" |
715-17342-001 |
4 |
|
HEATED
ROUGHING MANIFOLD |
853-032938-001 |
1 |
|
HIGH TEMP
PADDLE |
853-347146-008 |
1 |
|
PUMP
MOTOR |
676-024624-001 |
4 |
|
JOINT
UNIVERSAL |
749-08731-001 |
3 |
|
LABEL
BLANK |
785-005639-001 |
5 |
|
PACKING |
FG-40S (23TH) |
2 |
|
LINER |
714-330829-001 |
4 |
|
LOWER
ELECTRODE |
715-18611-108 |
1 |
|
PRECUT
KAPTON TAPE |
716-011653-001 |
61 |
|
R,UPPER
CHAMBER FXD GAP-2 |
715-330133-001 |
3 |
|
RING
BOTTOM GAS FEED |
715-330024-002 |
2 |
|
RING EDGE |
716-28396-001 |
1 |
|
RING
ELECTRODE FILLER |
715-11914-001 |
6 |
|
RING
FUCUS |
713-011666-006 |
1 |
|
RING GAS
FEED FLG |
715-350036-001 |
4 |
|
RING
ORILICE |
715-11059-001 |
1 |
|
RING,CONFINEWENT |
713-028553-001 |
2 |
|
SCR,SOCHD,VENTED
4-40*.25 |
796-08353-002 |
3 |
|
SCREW FL
HD |
720-90896-006 |
10 |
|
SCREW
FLATHD VENT |
796-08918-007 |
10 |
|
SCREW SOC
HD KEL-F |
720-09410-012 |
50 |
|
SCREW
SOCKET |
720-060824-024 |
12 |
|
SCREW
SOCKETHEAD CAP |
720-00960-020 |
7 |
|
SCREW
WINDOW HTD EPD |
714-330356-001 |
10 |
|
SCREW,SOC
HD KEL-F |
720-09410-008 |
16 |
|
SEAT
LENDS EIP |
715-18928-001 |
1 |
|
SHLD WDO
UV HTD |
713-330374-004 |
20 |
|
SHLD
WINDOW UV HTD |
713-330374-001 |
9 |
|
SPACER
.252*50 ALUM |
723-09178-007 |
10 |
|
SPACER
QUARTZ |
716-011493-003 |
2 |
|
STRIKE
LATCH |
726-01514-001 |
7 |
|
VDS TEMP
CONT UNIT |
778-090791-004 |
8 |
|
VTR/MTR 5
ENCODER |
810-550092-001 |
2 |
|
WASHER
FLT #2 SST |
721-00916-001 |
8 |
|
WASHER
INSULATOR MACH BOX/ |
713-15097-001 |
12 |
|
WASHER |
721-00936-001 |
4 |
|
WELDMENT
HE&VAC TUBE |
839-24498-100 |
2 |
|
WELDMENT
LL VAC GUAGES/LL |
839-011237-001 |
1 |
|
RANDANRING |
FG-40S(20TH) |
2 |
|
SEAL |
FG-40S (19TH) |
2 |
|
BACK
RUBBER CASING |
FG-40S-13 |
1 |
|
ELBOW
MALE 1/8NPT*32T |
KQL03-34S |
50 |
|
(S)RING,EDGE
8"WAFER |
715-030106-008 |
1 |
|
ELB MALE
S/W SST |
921-097323-001 |
1 |
|
CYLINDER |
770-009005-001 |
4 |
|
IC ADIO
BUFFER HCT 374 |
631-07367-374 |
50 |
|
O-RING |
734-08546-001 |
42 |
|
FILTER
OPTICAL 840NM |
795-90154-001 |
1 |
|
BRG WHL
GDE 250MM |
746-097904-001 |
8 |
|
SHIELD
LINE |
739-S009053-001 |
2 |
|
SPRAL
WARP TEFLON 3/8 |
686-008917-002 |
1 |
|
SHAFT DRIVE ARM |
715-006551-001 |
3 |
|
HOUSING SEAL QUAD RING
HOWER |
715-006602-001 |
7 |
|
|
713-028553-001 |
2 |
|
LONG'S MFG |
715-30079-1-1 |
5 |
|
PLUG GAP
GAUGE |
713-010221-003 |
4 |
|
BASE GAP GAUGE |
713-010222-003 |
4 |
|
FLOWMETRE VETICAL PORT |
771-06781-026 |
7 |
|
ASSY,
THERMOCOUPLE |
853-53545-001 |
1 |
|
VAC
SWITCH |
853-57124-001 |
1 |
|
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