| < DRY ETCH ANELVA > | ||
| Description | Part Number | Qty |
| WAFER TRANSPORT BELT | #166 O-RING | 38 |
| DIAMETER FILTER | 25MM | 4 |
| BP2 ASS'Y | 2.6.4 | 1 |
| EXTENDER BOARD | 32006 | 7 |
| ADAPTER | 3013-0813 | 2 |
| TMP SHAFT NEEDLE VALVE | 2412L-S-1/4N2 | 1 |
| BELT (TYPE I) | 475P5M10 | 4 |
| TIMMING BELT | 400P5M10 | 4 |
| O-RING VITON | 33-3801545 | 5 |
| BEARING HOLDER | 835-1927A | 2 |
| BEARING | 824-0631,SM-10 | 34 |
| O-RING VITON | 33-3802255 | 7 |
| BEARING | 695ZZ | 9 |
| MAGNATIC CONTACTOR(SRCA-3931-02) | 711-50090 | 13 |
| MAGNATIC CONTACTOR(SRCA-3931-02) | 711-50091 | 13 |
| MAGNATIC CONTACTOR(SRCA-3932-02) | 711-50089 | 13 |
| RF TUBE 1.5KW | 3CX1500A7 | 1 |
| BEARING | FL695 | 24 |
| AIRLOCK HATCH | A13-06099 | 2 |
| AL DRIVER | A12-13149 | 1 |
| APC/DG UNIT | A11-08829/05172 &A12-11285 | 1 |
| COLAUR | 805-0294A | 1 |
| COVER | A16-56758(ILD4015) | 1 |
| CONVEY | 853-6377 | 2 |
| EXTENSION PCB | JAE PBKS-44D-24R2G | 2 |
| FORK ARM ASS'Y | A11-00906 | 4 |
| SWITCHING REGULATOR | ETH-5D | 1 |
| PISTON (2) | A17-21278 | 1 |
| PLATE IN SHIELD | A16-63622 (711-31169-1A) | 2 |
| HUB | 815-2930A | 4 |
| JOINT | 835-8679 | 21 |
| CONNECTOR EE-1001 | N07210161 | 10 |
| BEARING | N37028148 | 12 |
| SPRING | N3500609 | 5 |
| BALL BEARING | SS6-13 | 28 |
| BALL BEARING | SS6-15 | 35 |
| INTER KALE B PCB | PC3001 | 2 |
| INTERFACE B PCB | PC3003 | 2 |
| 1625-03P1 CONNECTOR(MOLEX) | N14004331 | 1 |
| PRESSURE CONTROLLER | VSP-0666-1 | 1 |
| ARM MOTOR | N15012024 | 1 |
| D/G CUT VALVE ASS'Y | VMT-5017 | 1 |
| MICRO SWITCH | S-5GW2 | 4 |
| O-RING JIS-B2401 | V-380 | 6 |
| O-RING VITON | V-430 | 3 |
| PLASMA MONITOR | L-1214 | 5 |
| VCO O-RING | VT-7 | 23 |
| CYLINDER | N42002036 | 2 |
| VARIABLE CONDUCTANCE VALVE ASS'Y | P15-166 | 1 |
| PY 100*80 ST AIR CYLINDER | VSP-0745 (832-1359) | 3 |
| O-RING VITON | P-12-T3(R) | 53 |
| CIRCUIT PROTECTOR | NRBM2100X,40A | 1 |
| CIRCUIT PROTECTOR | NRSA3100X,20A | 2 |
| O-RING VITON | P-130 | 26 |
| O-RING VITON | P-37 | 3 |
| SNAP RETAINER | NO 30100 (SUS) | 3 |
| WIRING | MP-0041 | 4 |
| HOSE METAL | ORS-6038-08 | 30 |
| PY49 GLASS PLATE | P16-06493 | 1 |
| BEARING | 696 | 20 |
| TIMING BELT | B236MXL4.8 | 10 |
| INTERFACE B PCB | 1 | |
| O-RING VITON | G-160 | 19 |
| O-RING VITON | G-170 | 8 |
| O-RING VITON | G-180 | 4 |
| SOCKET | K2003 | 14 |
| LAMP ILLUMINATION SWITCH | 01-903 | 10 |
| O-RING | V-845 | 4 |