<
DRY ETCH ANELVA > |
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Description |
Part Number |
Qty |
WAFER TRANSPORT BELT |
#166 O-RING |
38 |
DIAMETER
FILTER |
25MM |
4 |
BP2 ASS'Y |
2.6.4 |
1 |
EXTENDER
BOARD |
32006 |
7 |
ADAPTER |
3013-0813 |
2 |
TMP SHAFT
NEEDLE VALVE |
2412L-S-1/4N2 |
1 |
BELT
(TYPE I) |
475P5M10 |
4 |
TIMMING
BELT |
400P5M10 |
4 |
O-RING
VITON |
33-3801545 |
5 |
BEARING
HOLDER |
835-1927A |
2 |
BEARING |
824-0631,SM-10 |
34 |
O-RING
VITON |
33-3802255 |
7 |
BEARING |
695ZZ |
9 |
MAGNATIC
CONTACTOR(SRCA-3931-02) |
711-50090 |
13 |
MAGNATIC
CONTACTOR(SRCA-3931-02) |
711-50091 |
13 |
MAGNATIC
CONTACTOR(SRCA-3932-02) |
711-50089 |
13 |
RF TUBE
1.5KW |
3CX1500A7 |
1 |
BEARING |
FL695 |
24 |
AIRLOCK
HATCH |
A13-06099 |
2 |
AL DRIVER |
A12-13149 |
1 |
APC/DG
UNIT |
A11-08829/05172
&A12-11285 |
1 |
COLAUR |
805-0294A |
1 |
COVER |
A16-56758(ILD4015) |
1 |
CONVEY |
853-6377 |
2 |
EXTENSION
PCB |
JAE
PBKS-44D-24R2G |
2 |
FORK ARM
ASS'Y |
A11-00906 |
4 |
SWITCHING
REGULATOR |
ETH-5D |
1 |
PISTON
(2) |
A17-21278 |
1 |
PLATE IN
SHIELD |
A16-63622
(711-31169-1A) |
2 |
HUB |
815-2930A |
4 |
JOINT |
835-8679 |
21 |
CONNECTOR
EE-1001 |
N07210161 |
10 |
BEARING |
N37028148 |
12 |
SPRING |
N3500609 |
5 |
BALL
BEARING |
SS6-13 |
28 |
BALL
BEARING |
SS6-15 |
35 |
INTER
KALE B PCB |
PC3001 |
2 |
INTERFACE
B PCB |
PC3003 |
2 |
1625-03P1
CONNECTOR(MOLEX) |
N14004331 |
1 |
PRESSURE
CONTROLLER |
VSP-0666-1 |
1 |
ARM MOTOR |
N15012024 |
1 |
D/G CUT
VALVE ASS'Y |
VMT-5017 |
1 |
MICRO
SWITCH |
S-5GW2 |
4 |
O-RING
JIS-B2401 |
V-380 |
6 |
O-RING
VITON |
V-430 |
3 |
PLASMA
MONITOR |
L-1214 |
5 |
VCO
O-RING |
VT-7 |
23 |
CYLINDER |
N42002036 |
2 |
VARIABLE
CONDUCTANCE VALVE ASS'Y |
P15-166 |
1 |
PY 100*80
ST AIR CYLINDER |
VSP-0745 (832-1359) |
3 |
O-RING
VITON |
P-12-T3(R) |
53 |
CIRCUIT
PROTECTOR |
NRBM2100X,40A |
1 |
CIRCUIT
PROTECTOR |
NRSA3100X,20A |
2 |
O-RING
VITON |
P-130 |
26 |
O-RING
VITON |
P-37 |
3 |
SNAP
RETAINER |
NO 30100 (SUS) |
3 |
WIRING |
MP-0041 |
4 |
HOSE
METAL |
ORS-6038-08 |
30 |
PY49
GLASS PLATE |
P16-06493 |
1 |
BEARING |
696 |
20 |
TIMING
BELT |
B236MXL4.8 |
10 |
INTERFACE
B PCB |
|
1 |
O-RING
VITON |
G-160 |
19 |
O-RING
VITON |
G-170 |
8 |
O-RING
VITON |
G-180 |
4 |
SOCKET |
K2003 |
14 |
LAMP
ILLUMINATION SWITCH |
01-903 |
10 |
O-RING |
V-845 |
4 |
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